Abstract: A device for edge- and surface inspection of flat objects, particularly patterned, sawn, broken, or partial wafers, and wafers of any kind on film frames, dies, displays, glass-ceramic or metal samples or batches of such materials, Die waffle packs, and multichip modules, comprises an inspection head, with an object lens and a bright field illumination unit having a light source and an optical assembly, wherein light generated by said light source is directed by said optical assembly towards said object with an angle of incidence for illuminating said object and wherein said light is reflected from said object in the direction of said object lens; and a support for supporting said object at said edge, said support having several support arms along said edge, wherein at least one of said support arms is removable from said edge while the edge is inspected in the range of said removable support arm.

Abstract: In the case of a handling apparatus for passing electronic components, in particular ICs, which are provided in a component carrier, to a testing apparatus, a component holder having a positioning device is provided and has movable clamping elements which can be moved from an open position, in which they are at a distance from the side edges of the component, into a clamping position, in which they apply a pressure force, which prevents lateral movement of the component, to the side edges of the component.

Abstract: In the case of a handling apparatus for passing electronic components, in particular ICs, which are provided in a component carrier, to a testing apparatus, a component holder having a positioning device is provided and has movable clamping elements which can be moved from an open position, in which they are at a distance from the side edges of the component, into a clamping position, in which they apply a pressure force, which prevents lateral movement of the component, to the side edges of the component.

Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.

Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.