Abstract: An intermediary layer is introduced between a lens and a wafer for an immersion lithography process. A non-supercritical gas is provided and condensed to form a layer of liquid between the lens and the wafer. The substrate may be irradiated through the lens and intermediary layer. In addition, the intermediary layer may then be evaporated. The non-supercritical gas may include superheated steam which may be condensed to form a layer of water between the lens and the wafer. The wafer may be irradiated with one of a EUV light and UV light. A system for introduction of an intermediary layer between a lens and a wafer for an immersion lithography process is also provided. The wafer for use in the immersion lithography process may includes a hydrophobic and hydrophilic surfaces to provide enhanced contact angles between the wafer and the intermediary liquid layer condensed on the wafer and to reduce light aberration provided from a light source through the intermediary liquid layer.

Abstract: In one general aspect, a communications system as described herein provides a wide-band jamming signal that is digitally created, conditioned, and modified by a processing based system to provide open data channels to authorized parties within a jammed communications band. The communications system modifies and maintains the open data channels to sustain communications between authorized devices. In addition, the communications system provides frequency hopping using the open data channels to supply secure data links to authorized devices within the jammed communications band while denying service to unauthorized communication nodes or devices.

Abstract: A far field radio frequency identification (RFID) tagging and tracking system employing a plurality of continuous wave (CW), unmodulated signals selected from frequencies including a predetermined frequency band, includes a RFID interrogator generating a group of CW unmodulated signals corresponding to a RFID tag and receiving a tag identification (ID) signal sequence uniquely identifying the RFID tag, while the RFID tag includes a power source supplying power to the RFID tag but not including a microprocessor. A corresponding RFID tag and method for operating both the tag and the system are also described.