Patents by Inventor Blake Darby

Blake Darby has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Engineering of porous coatings formed by ion-assisted direct deposition
    Patent number: 8946061
    Abstract: In one embodiment, a method of producing a porous semiconductor film on a workpiece includes generating semiconductor precursor ions that comprise one or more of: germanium precursor ions and silicon precursor ions in a plasma of a plasma chamber, in which the semiconductor precursor ions are operative to form a porous film on the workpiece. The method further includes directing the semiconductor precursor ions to the workpiece over a range of angles.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: February 3, 2015
    Assignee: Varian Semiconductor Equiptment Associates, Inc.
    Inventors: Blake Darby, Ludovic Godet, Xianfeng Lu
  • ENGINEERING OF POROUS COATINGS FORMED BY ION-ASSISTED DIRECT DEPOSITION
    Publication number: 20130052810
    Abstract: In one embodiment, a method of producing a porous semiconductor film on a workpiece includes generating semiconductor precursor ions that comprise one or more of: germanium precursor ions and silicon precursor ions in a plasma of a plasma chamber, in which the semiconductor precursor ions are operative to form a porous film on the workpiece. The method further includes directing the semiconductor precursor ions to the workpiece over a range of angles.
    Type: Application
    Filed: August 28, 2012
    Publication date: February 28, 2013
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Blake Darby, Ludovic GODET, Xianfeng LU