Patents by Inventor Blake E. Cherrington

Blake E. Cherrington has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High density plasma source for semiconductor processing
    Patent number: 6028285
    Abstract: An apparatus for producing a plasma (70) within a vacuum chamber (50) comprising a high density plasma source (10) is disclosed wherein the source (10) comprises a top layer (13) and a bottom layer (11) electrically connected to and spaced apart from each other, in a manner to adjust the fields generated by the source (10), hence the uniformity of the plasma (70), wherein the top and bottom layers (13, 11) are formed by a plurality of conductive loops.
    Type: Grant
    Filed: November 19, 1997
    Date of Patent: February 22, 2000
    Assignee: Board of Regents, The University of Texas System
    Inventors: Marwan H. Khater, Lawrence J. Overzet, Blake E. Cherrington