Patents by Inventor Blandine Marie Andree Richit MINGHETTI

Blandine Marie Andree Richit MINGHETTI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR LITHOGRAPHIC PROCESS PERFORMANCE DETERMINATION
    Publication number: 20220291593
    Abstract: A method for characterizing a patterning process, the method including obtaining a plurality of values of stitching errors made along one or more boundaries between at least two patterned adjacent fields or sub-fields on a substrate; and fitting, using a hardware computer system, a distortion model to the plurality of values to obtain a fingerprint representing deformation of a field or sub-field out of the at least two patterned adjacent fields or sub-fields.
    Type: Application
    Filed: August 5, 2020
    Publication date: September 15, 2022
    Inventors: Roy WERKMAN, Pui Leng LAM, Blandine Marie Andree Richit MINGHETTI, Vahid BASTANI, Mohamadrezh HAJIAHMADI, Lydia Marianna VERGAIJ-HUIZER, Frans Reinier SPIERING