Abstract: Severe mechanical deformation in addition to thermal processing can be used to produce microstructural refinement in iron-cobalt-vanadium alloys. As an example, significant grain refinement through Equal Channel Angular Extrusion (ECAE), also known as Equal Channel Angular Pressing (ECAP), at high temperatures was demonstrated in bulk Hiperco soft magnetic alloy. The ECAE material exhibited high strength levels comparable to Hiperco sheet and the ductility was higher than heat treated conventional bar with large grain size. The increase in ductility was attributed to small grain size and the disordered phase that may co-exist with the ordered phase. In addition, the ECAP material also displays good magnetic properties, with relatively high magnetic saturation as shown in the B-H curve. The heat treatment after ECAP improves magnetic performance, with some tradeoff in mechanical properties.

Abstract: A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.

Abstract: The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.

Abstract: The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.