Patents by Inventor Bo B. DING

Bo B. DING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • External clamp ring for a chemical mechanical polishing carrier head
    Patent number: 10029346
    Abstract: An external clamp ring for a chemical mechanical polishing (CMP) carrier head having a hydrophobic coating, and a carrier head having the same are described herein. In one embodiment, an external clamp ring is provided that includes a cylindrical body having an outer cylindrical wall and an inner cylindrical wall. A hydrophobic layer disposed is on the outer cylindrical wall.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: July 24, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Patrick Ala, Bo B. Ding, Yongqi Hu, Simon Yavelberg, Mats Larsson
  • EXTERNAL CLAMP RING FOR A CHECMICAL MECHANICAL POLISHING CARRIER HEAD
    Publication number: 20170106496
    Abstract: An external clamp ring for a chemical mechanical polishing (CMP) carrier head having a hydrophobic coating, and a carrier head having the same are described herein. In one embodiment, an external clamp ring is provided that includes a cylindrical body having an outer cylindrical wall and an inner cylindrical wall. A hydrophobic layer disposed is on the outer cylindrical wall.
    Type: Application
    Filed: June 8, 2016
    Publication date: April 20, 2017
    Inventors: Patrick ALA, Bo B. DING, Yongqi HU, Simon YAVELBERG, Mats LARSSON