Abstract: Disclosed are methods and systems for providing silicon carbide films. A layer of silicon carbide can be provided under process conditions that employ one or more silicon-containing precursors that have one or more silicon-hydrogen bonds and/or silicon-silicon bonds. The silicon-containing precursors may also have one or more silicon-oxygen bonds and/or silicon-carbon bonds. One or more radical species in a substantially low energy state can react with the silicon-containing precursors to form the silicon carbide film. The one or more radical species can be formed in a remote plasma source.

Abstract: An online cleaning system for micro-polluted nanofiltration membranes uses forward osmosis, and a process of the online cleaning system, and relates to the field of water treatment membrane separation technique. The online cleaning system includes a nanofiltration raw water tank, a nanofiltration membrane assembly, a pure water tank, a forward osmosis feed solution tank, a forward osmosis draw solution tank, a first saline water tank, a second saline water tank and a water bath temperature control device. Some embodiments include cleaning of the nanofiltration membranes that is realized by using forward osmosis as a nanofiltration membrane cleaning system, and cyclic regeneration of the nanofiltration membranes can be realized, so that the purposes of removing dissolved organic matters in micro-polluted raw water, reducing hardness of calcium and magnesium and prolonging the service life can be achieved.

Abstract: An online cleaning system for micro-polluted nanofiltration membranes uses forward osmosis, and a process of the online cleaning system, and relates to the field of water treatment membrane separation technique. The online cleaning system includes a nanofiltration raw water tank, a nanofiltration membrane assembly, a pure water tank, a forward osmosis feed solution tank, a forward osmosis draw solution tank, a first saline water tank, a second saline water tank and a water bath temperature control device. Compared with convention techniques, some embodiments include efficient cleaning of the nanofiltration membranes that is realized by using forward osmosis as a nanofiltration membrane cleaning system, and cyclic regeneration of the nanofiltration membranes can be realized, so that the purposes of removing dissolved organic matters in micro-polluted raw water, reducing hardness of calcium and magnesium and prolonging the service life can be achieved.