Abstract: This application describes systems and methods for detecting depth in deep trench isolation with semiconductor devices using test key transistors. An example semiconductor device comprises a test key transistor comprising a source, a drain, a channel connected to the source and the drain, and a gate; and a deep trench isolation encroaching into the channel of the test key transistor, wherein: the test key transistor is associated with a specification including a preset gate voltage, a preset source-drain voltage difference, and a predetermined current, and the test key transistor is configured to generate a current within a threshold difference from the predetermined current in the channel in response to receiving the preset gate voltage at the gate and the preset source-drain voltage difference at the source and the drain, and the deep trench isolation encroaches into the channel at a preset depth.

Abstract: This application describes systems and methods related to vertical transfer gates.

Abstract: An image-sensing device is provided. The image-sensing device includes a substrate, a light-sensing element, a first dielectric layer, a light-guiding structure, and a patterned conductive layer. The light-sensing element is disposed in the substrate. The first dielectric layer is disposed on the first side of the substrate. The light-guiding structure is disposed in the first dielectric layer. The patterned conductive layer is disposed between the light-sensing element and the light-guiding structure. In addition, the patterned conductive layer includes a subwavelength structure. An image-sensing system including the above image-sensing device is also provided.

Abstract: An image sensor is provided. The image sensor includes a substrate, a photodiode, and a storage node. The photodiode is disposed in the substrate and close to a first end of the substrate. The storage node is disposed in the substrate, adjacent to the photodiode, and close to the first end of the substrate. The image sensor further includes a first isolation structure, a first light shielding structure, an interlayer dielectric layer, and a lens structure. The first isolation structure is disposed in the substrate and over the storage node. The first light shielding structure is disposed in the first isolation structure. The interlayer dielectric layer is disposed over a second end of the substrate. The second end is opposite the first end. The lens structure is disposed over the interlayer dielectric layer.

Abstract: An image sensing device is provided. The image sensing device includes a substrate, a plurality of photosensitive elements, a dielectric layer, a reflector, a color filter, and a microlens structure. The substrate has a first pixel and a second pixel adjacent to the first pixel, and the substrate has a front side and a back side opposite the front side. The photosensitive elements are disposed in the substrate. The dielectric layer is disposed on the back side of the substrate. The reflection is disposed on the front side of the substrate and has a parabolic surface. The color filter layer is disposed on the dielectric layer. The microlens structure is disposed on the color filter layer.

Abstract: Image-sensing devices are provided. An image-sensing device includes a substrate, a first dielectric layer, an image sensor array, a plurality of nanowells and a plurality of electrodes. The first dielectric layer is formed on the substrate, and has a first side and a second side. The image sensor array is formed between the substrate and the second side of the first dielectric layer, and includes a plurality of image-sensing cells. The nanowells are formed in the first dielectric layer, and each of the nanowells has an opening on the first side of the first dielectric layer. Each of the electrodes extends from the second side to the first side of the first dielectric layer and is located between two adjacent nanowells.

Abstract: An image-sensing device is provided. An image sensor array is formed in a substrate. A micro lens array is formed on the image sensor array. A color filter array is formed between the micro lens array and the image sensor array. The color filter array includes a plurality of blue filters, a plurality of red filters, a plurality of first combined filters and a plurality of second combined filters. Each of the first combined filters and the second combined filters includes two first sub-filters and two second sub-filters. The first sub-filter and the second sub-filter have a similar extinction coefficient in a first specific wavelength range, and have different extinction coefficients in a second specific wavelength range. The area of the first sub-filter and the second sub-filter is smaller than the area of the blue filter and the red filter.

Abstract: An image sensing device is provided. The image sensing device includes a substrate, a plurality of photosensitive elements, a dielectric layer, a reflector, a color filter, and a microlens structure. The substrate has a first pixel and a second pixel adjacent to the first pixel, and the substrate has a front side and a back side opposite the front side. The photosensitive elements are disposed in the substrate. The dielectric layer is disposed on the back side of the substrate. The reflection is disposed on the front side of the substrate and has a parabolic surface. The color filter layer is disposed on the dielectric layer. The microlens structure is disposed on the color filter layer.

Abstract: An image sensor structure including: a substrate, having a first conductive type; a first well region and a second well region disposed in the substrate and spaced apart; an isolation region disposed in the first well region; a gate disposed on the substrate and between the first well region and the second well region; and a pinned photodiode disposed in the substrate and between the first well region and the second well region is provided. The pinned photodiode includes: a first doping region disposed in the substrate and having a first doping concentration and the first conductive type; and a second doping region disposed on the first doping region and having a second doping concentration opposite to the first conductive type. One or both of the first doping region and the second doping region is non-uniform and the first doping concentration is greater than the second doping concentration.

Abstract: An image-sensing device is provided. The image-sensing device includes a substrate, a light-sensing element, a first dielectric layer, a light-guiding structure, and a patterned conductive layer. The light-sensing element is disposed in the substrate. The first dielectric layer is disposed on the first side of the substrate. The light-guiding structure is disposed in the first dielectric layer. The patterned conductive layer is disposed between the light-sensing element and the light-guiding structure. In addition, the patterned conductive layer includes a subwavelength structure. An image-sensing system including the above image-sensing device is also provided.

Abstract: An image sensor includes a semiconductor substrate, a first annular doped area, a second annular doped area, an annular isolation area, a photoelectric conversion area, a voltage conversion area, and a gate structure. The first annular doped area is disposed in the semiconductor substrate and includes a first type dopant. The second annular doped area is disposed in the semiconductor substrate, and over the first annular doped area, the second annular doped region includes a second type dopant. The annular isolation area is disposed in the semiconductor substrate and over the second annular doped area. The photoelectric conversion area is disposed in the semiconductor substrate surrounded by the annular isolation area. The voltage conversion area is disposed in the semiconductor substrate surrounded by the annular isolation area. The gate structure is disposed on the semiconductor substrate.

Abstract: A global shutter CMOS image sensor includes a photodiode, a floating diffusion region, and a storage diode disposed in the upper portion of the substrate. The storage diode is disposed between the photodiode and the floating diffusion region. A first transfer gate is disposed on the substrate between the photodiode and the storage node. A second transfer gate is disposed on the substrate between the storage diode and the floating diffusion region. A first dielectric layer is disposed on the substrate and covers the first transfer gate and the second transfer gate. A light-shielding layer is disposed on the first dielectric layer. A light pipe is disposed through the light-shielding layer and a portion of the first dielectric layer, and is correspondingly disposed above the photodiode. The light pipe has a higher refractive index than the first dielectric layer.

Abstract: A global shutter CMOS image sensor includes a photodiode, a floating diffusion region, and a storage diode disposed in the upper portion of the substrate. The storage diode is disposed between the photodiode and the floating diffusion region. A first transfer gate is disposed on the substrate between the photodiode and the storage node. A second transfer gate is disposed on the substrate between the storage diode and the floating diffusion region. A first dielectric layer is disposed on the substrate and covers the first transfer gate and the second transfer gate. A light-shielding layer is disposed on the first dielectric layer. A light pipe is disposed through the light-shielding layer and a portion of the first dielectric layer, and is correspondingly disposed above the photodiode. The light pipe has a higher refractive index than the first dielectric layer.

Abstract: An image-sensing device includes a semiconductor substrate including an image-sensing region and a peripheral circuit region surrounding the image-sensing region. The image-sensing device further includes an image-sensing element disposed in the semiconductor substrate in the image-sensing region, and an imaging processing element disposed in the semiconductor substrate in the peripheral circuit region. The image-sensing device further includes a first isolation element disposed in the semiconductor substrate in the peripheral circuit region and adjacent to the image-sensing element in the image-sensing region. The first isolation element includes a metal portion having a coefficient of heat conduction greater than 149 W/m·K, and an imaginary part of a permittivity (Im(?)) of the metal portion under a light wavelength of 1100 nm is greater than 0.004.