Patents by Inventor Boaz Ophir
Boaz Ophir has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11783466Abstract: Metrology methods, modules and systems are provided, for using machine learning algorithms to improve the metrology accuracy and the overall process throughput. Methods comprise calculating training data concerning metrology metric(s) from initial metrology measurements, applying machine learning algorithm(s) to the calculated training data to derive an estimation model of the metrology metric(s), deriving measurement data from images of sites on received wafers, and using the estimation model to provide estimations of the metrology metric(s) with respect to the measurement data. While the training data may use two images per site, in operation a single image per site may suffice—reducing the measurement time to less than half the current measurement time. Moreover, confidence score(s) may be derived as an additional metrology and process control, and deep learning may be used to enhance the accuracy and/or speed of the metrology module.Type: GrantFiled: June 21, 2022Date of Patent: October 10, 2023Assignee: KLA CORPORATIONInventors: Boaz Ophir, Yehuda Odes, Udi Shusterman
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Publication number: 20220318987Abstract: Metrology methods, modules and systems are provided, for using machine learning algorithms to improve the metrology accuracy and the overall process throughput. Methods comprise calculating training data concerning metrology metric(s) from initial metrology measurements, applying machine learning algorithm(s) to the calculated training data to derive an estimation model of the metrology metric(s), deriving measurement data from images of sites on received wafers, and using the estimation model to provide estimations of the metrology metric(s) with respect to the measurement data. While the training data may use two images per site, in operation a single image per site may suffice—reducing the measurement time to less than half the current measurement time. Moreover, confidence score(s) may be derived as an additional metrology and process control, and deep learning may be used to enhance the accuracy and/or speed of the metrology module.Type: ApplicationFiled: June 21, 2022Publication date: October 6, 2022Inventors: Boaz Ophir, Yehuda Odes, Udi Shusterman
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Patent number: 11410290Abstract: Metrology methods, modules and systems are provided, for using machine learning algorithms to improve the metrology accuracy and the overall process throughput. Methods comprise calculating training data concerning metrology metric(s) from initial metrology measurements, applying machine learning algorithm(s) to the calculated training data to derive an estimation model of the metrology metric(s), deriving measurement data from images of sites on received wafers, and using the estimation model to provide estimations of the metrology metric(s) with respect to the measurement data. While the training data may use two images per site, in operation a single image per site may suffice—reducing the measurement time to less than half the current measurement time. Moreover, confidence score(s) may be derived as an additional metrology and process control, and deep learning may be used to enhance the accuracy and/or speed of the metrology module.Type: GrantFiled: December 23, 2019Date of Patent: August 9, 2022Assignee: KLA CORPORATIONInventors: Boaz Ophir, Yehuda Odes, Udi Shusterman
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Publication number: 20210142466Abstract: Metrology methods, modules and systems are provided, for using machine learning algorithms to improve the metrology accuracy and the overall process throughput. Methods comprise calculating training data concerning metrology metric(s) from initial metrology measurements, applying machine learning algorithm(s) to the calculated training data to derive an estimation model of the metrology metric(s), deriving measurement data from images of sites on received wafers, and using the estimation model to provide estimations of the metrology metric(s) with respect to the measurement data. While the training data may use two images per site, in operation a single image per site may suffice—reducing the measurement time to less than half the current measurement time. Moreover, confidence score(s) may be derived as an additional metrology and process control, and deep learning may be used to enhance the accuracy and/or speed of the metrology module.Type: ApplicationFiled: December 23, 2019Publication date: May 13, 2021Inventors: Boaz Ophir, Yehuda Odes, Udi Shusterman
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Patent number: 9999402Abstract: A computer implemented method, a computerized system and a computer program product for automatic image segmentation. The computer implemented method comprises obtaining an image of a tissue, wherein the image is produced using an imaging modality. The method further comprises automatically identifying, by a processor, a tissue segment within the image, wherein said identifying comprises identifying an artifact within the image, wherein the artifact is a misrepresentation of a tissue structure, wherein the misrepresentation is associated with the imaging modality; and searching for the tissue segment in a location adjacent to the artifact.Type: GrantFiled: July 21, 2014Date of Patent: June 19, 2018Assignee: International Business Machines CorporationInventors: Dan Chevion, Pavel Kisilev, Boaz Ophir, Eugene Walach
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Publication number: 20160015360Abstract: A computer implemented method, a computerized system and a computer program product for automatic image segmentation. The computer implemented method comprises obtaining an image of a tissue, wherein the image is produced using an imaging modality. The method further comprises automatically identifying, by a processor, a tissue segment within the image, wherein said identifying comprises identifying an artifact within the image, wherein the artifact is a misrepresentation of a tissue structure, wherein the misrepresentation is associated with the imaging modality; and searching for the tissue segment in a location adjacent to the artifact.Type: ApplicationFiled: July 21, 2014Publication date: January 21, 2016Inventors: Dan Chevion, Pavel Kisilev, Boaz Ophir, Eugene Walach
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Patent number: 8249399Abstract: A method for optical character recognition (OCR) verification, the method includes: receiving a first character image that was obtained from applying an OCR process on a document; wherein the first character image is classified, by the OCR, as being associated with a first character; receiving a first character code of a text; replacing the first character code by the first character image; and evaluating a correctness of the OCR based upon a response of a user to a display of the text first character image.Type: GrantFiled: September 16, 2008Date of Patent: August 21, 2012Assignee: International Business Machines CorporationInventors: Ella Barkan, Dan Shmuel Chevion, Boaz Ophir, Doron Tal
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Publication number: 20100067794Abstract: A method for optical character recognition (OCR) verification, the method includes: receiving a first character image that was obtained from applying an OCR process on a document; wherein the first character image is classified, by the OCR, as being associated with a first character; receiving a first character code of a text; replacing the first character code by the first character image; and evaluating a correctness of the OCR based upon a response of a user to a display of the text first character image.Type: ApplicationFiled: September 16, 2008Publication date: March 18, 2010Inventors: Ella Barkan, Dan Shmuel Chevion, Boaz Ophir, Doron Tal
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Publication number: 20090148043Abstract: Text is extracted from a grayscale or color compound digital image. Kernels of text in the compound digital image are found using a stroke operator. The kernels of text are segmented into text blocks based on image space, color space, and intensity space. Each text block is segmented into text and background pixels using active contour analysis. The segmented text blocks are refined by altering parameters in the active contour analysis. Text is extracted from the refined segmented text blocks, and a binary image is created including text extracted from the refined segmented text blocks.Type: ApplicationFiled: December 6, 2007Publication date: June 11, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Boaz Ophir, Yaakov Navon
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Publication number: 20090144056Abstract: A method for providing recognition error correction information, the method includes: obtaining metadata associated with a capture of a media item; and generating recognition error correction information in response to the metadata. The recognition error correction information is to be used in a recognition process selected out of a list consisting of an automatic speech recognition process and an optical characters recognition process.Type: ApplicationFiled: November 29, 2007Publication date: June 4, 2009Inventors: Netta Aizenbud-Reshef, Ella Barkan, Eran Belinsky, Jonathan Joseph Mamou, Yaakov Navon, Boaz Ophir