Patents by Inventor Bob Rollinger

Bob Rollinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Extreme ultraviolet light source with a debris-mitigated and cooled collector optics
    Patent number: 8723147
    Abstract: The extreme ultraviolet light source comprises a production site capable of producing extreme ultraviolet radiation in a laser-produced plasma (3), and a collector optics (6) for collimating the extreme ultraviolet radiation. A pressurized influx of gas forms a gas curtain between the production site and the collector optics (6) in order to protect the collector optics (6) from debris (4) generated at the production site. The gas influx is directed in a way that it follows the surface of the collector optics (6). By thus shielding the collector optics (6) from the debris (4) its lifetime is enhanced. The shielding gas can further be used for cooling the collector optics (6).
    Type: Grant
    Filed: March 25, 2010
    Date of Patent: May 13, 2014
    Assignee: ETH Zürich
    Inventors: Reza Abhari, Andrea Giovannini, Bob Rollinger, Davide Bleiner