Patents by Inventor Boerje Dube

Boerje Dube has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for slurry distribution
    Publication number: 20080171494
    Abstract: A assembly for a chemical mechanical polishing apparatus includes a carrier head and a polishing liquid delivery ring. The carrier head has a substrate receiving surface and a retaining ring surrounding the substrate receiving surface. The polishing liquid delivery ring is coupled to the carrier head and surrounds the retaining ring. The polishing liquid delivery ring includes a reservoir to hold a liquid and an outlet in fluid communication with the reservoir and positioned to dispense the liquid to a location on a polishing surface outside the retaining ring.
    Type: Application
    Filed: August 17, 2007
    Publication date: July 17, 2008
    Applicant: Applied Materials, Inc.
    Inventors: Boerje Dube, Joerg Rittner, Rene Eichhorn