Patents by Inventor Boguslaw Andrzej Nagorski

Boguslaw Andrzej Nagorski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Work piece carrier head for plating and polishing
    Patent number: 6612915
    Abstract: A work piece carrier head can carry a semiconductor wafer during both plating and polishing operations. The carrier head includes a first component secured to a shaft by which the carrier head can be rotated, translated, and moved up and down, a second component connected to the first component and movable by fluid pressure relative to the first component between retracted and extended positions, and a third component connected to the first and second components for up and down movement between wafer loading or unloading and wafer plating or polishing positions. The third carrier head component includes a contact element by which electrical contact with the wafer is provided to permit wafer plating.
    Type: Grant
    Filed: December 27, 1999
    Date of Patent: September 2, 2003
    Assignee: NuTool Inc.
    Inventors: Cyprian Uzoh, Boguslaw Andrzej Nagorski, Konstantin Volodarsky, Douglas W. Young