Patents by Inventor Bohang ZHU

Bohang ZHU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
    Publication number: 20230246568
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Application
    Filed: April 10, 2023
    Publication date: August 3, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco KOOIKER, Michael Johannes Christiaan RONDE, Arno Maria WELLINK, Shibing LIU, Ying LUO, Yixiang WANG, Chia-Yao CHEN, Bohang ZHU, Jurgen VAN SOEST
  • Object table comprising an electrostatic clamp
    Patent number: 11637512
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: April 25, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius Huinck, Han Willem Hendrik Severt, Allard Eelco Kooiker, Michaël Johannes Christiaan Ronde, Arno Maria Wellink, Shibing Liu, Ying Luo, Yixiang Wang, Chia-Yao Chen, Bohang Zhu, Jurgen Van Soest
  • SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS
    Publication number: 20220068590
    Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.
    Type: Application
    Filed: December 19, 2019
    Publication date: March 3, 2022
    Inventors: Ying LUO, Zhonghua DONG, Xuehui YIN, Long DI, Nianpei DENG, Wei FANG, Lingling PU, Ruochong FEI, Bohang ZHU, Yu LIU
  • OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
    Publication number: 20210313908
    Abstract: Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.
    Type: Application
    Filed: June 17, 2021
    Publication date: October 7, 2021
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco KOOIKER, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK, Shibing LIU, Ying LUO, Yixiang WANG, Chia-Yao CHEN, Bohang ZHU, Jurgen VAN SOEST