Abstract: Proposed are a process fluid treatment apparatus capable of decomposing ozone in a process fluid more effectively, and a wafer cleaning apparatus and semiconductor manufacturing equipment including the same. The process fluid treatment apparatus treats the process fluid used for cleaning a wafer in the semiconductor manufacturing equipment, and includes a housing having an inner space configured to contain the process fluid, a spray nozzle configured to spray the process fluid containing ozone into the inner space in the form of mist, and a nozzle heater configured to heat the process fluid passing through the spray nozzle.

Abstract: A flow indicator is disclosed and includes a horizontally disposed housing having a lower cap with a lower inlet port drawing in an air sample, an interior space passing the air sample, an upper cap having an upper outlet port exhausting the air sample, and a transparent tube coupled between the lower and upper caps and functioning as a transparent window allowing visual observation of at least a portion of the interior space. The flow indicator also includes a floater disposed within the housing and moving vertically in response to the flow of the air sample to indicate a flow rate for the air sample.

Abstract: A flow indicator includes a horizontally disposed housing having a lower inlet port drawing in an air sample, an interior space passing the air sample, an upper outlet port exhausting the air sample, and a transparent window allowing visual observation of at least a portion of the interior space. The flow indicator also includes a floater disposed within the housing to move vertically in response to the flow of the air sample to indicate a flow rate for the air sample, and a guide member extending upward from a lower portion of the housing and guiding movement of the floater.

Abstract: A flow indicator is disclosed and includes a horizontally disposed housing including a lower inlet port drawing in an air sample, an interior space passing the air sample, an upper outlet port exhausting the air sample, and a transparent window allowing visual observation of at least a portion of the interior space. The flow indicator also includes a floater disposed within the housing and moving vertically in response to the flow of the air sample to indicate a flow rate for the air sample, wherein the housing further comprises a plurality of rails protruding from an inner surface of the housing and extending vertically to guide movement of the floater.

Abstract: A flow indicator comprising a housing and a floater and adapted to draw an air sample is provided. The housing has at least one lower inlet port, an interior space, an upper outlet port, and a transparent window. The floater is disposed inside the housing and is adapted to move substantially vertically in accordance with the flow of the air sample. The floater is also adapted to indicate a flow rate of the air sample.

Abstract: A particle adsorption device includes a chamber having an inlet and an outlet by which air can pass through the chamber, a support for supporting an adsorbent plate in the chamber, and at least one porous plate disposed in the chamber to control the air flow through the chamber and over a surface of the adsorbent plate. A sampling apparatus includes a particle counter which has a detector that is operative to count particles of a certain size contained in the air, the particle adsorption device, and a probe by which a sample of air is sequentially or selectively fed to the particle adsorption device and the particle counter. Thus, in a method for use in monitoring a manufacturing environment for potential contamination, particles of a certain size in the air can be counted, and particles in the air can be collected on the surface of the adsorbent plate. The collected particles can be analyzed to determine their shape and composition.

Abstract: A flow indicator comprising a housing and a floater and adapted to draw an air sample is provided. The housing has at least one lower inlet port, an interior space, an upper outlet port, and a transparent window. The floater is disposed inside the housing and is adapted to move substantially vertically in accordance with the flow of the air sample. The floater is also adapted to indicate a flow rate of the air sample.