Abstract: A method of detecting abnormalities includes: calculating a reference failure rate using failure data at a plurality of points in time included in a particular period; calculating a detection failure rate and weighting, corresponding to failure data at a detection time point after the particular period, using the reference failure rate; calculating an abnormality index based on multiplying the detection failure rate by the weighting; comparing the abnormality index with an index corresponding to a control limit for stably controlling a failure rate; and detecting whether the failure data at the detection time point is abnormal, based on a result of the comparison of the abnormality index with the index corresponding to the control limit.

Abstract: A quality affecting factor generation method for a semiconductor manufacturing process is provided. The method includes receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products, preprocessing the data of the customer evaluation result, determining critical quality factors that affect a quality of the semiconductor products by applying a statistical model to the preprocessed data of the customer evaluation result; and determining a semiconductor product to be shipped to a customer company as a good product and a failed product using the determined critical quality factors and generating quality affecting factors of the semiconductor products to be managed to improve yield in a semiconductor manufacturing process.

Abstract: A quality affecting factor generation method for a semiconductor manufacturing process is provided. The method includes receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products, preprocessing the data of the customer evaluation result, determining critical quality factors that affect a quality of the semiconductor products by applying a statistical model to the preprocessed data of the customer evaluation result; and determining a semiconductor product to be shipped to a customer company as a good product and a failed product using the determined critical quality factors and generating quality affecting factors of the semiconductor products to be managed to improve yield in a semiconductor manufacturing process.