Abstract: An apparatus for supporting a process of debonding a carrier glass sheet and an ultrathin glass sheet. A suction plate includes a plurality of suction hole portions defining suction holes for suction-holding a glass laminate seated thereon and at least one recess portion defining at least one recess accommodating at least one device layer protruding from one surface of an ultrathin glass sheet of the glass laminate. A plurality of suction cups are fitted to the plurality of suction hole portions, respectively, such that the plurality of suction cups are elastically compressible, in response to contact pressure of the ultrathin glass sheet and the device layer. A vacuum pump is connected to the plurality of suction hole portions to apply negative pressure to the plurality of suction hole portions. A controller controls the vacuum pump to adjust the negative pressure applied to the plurality of suction hole portions.

Abstract: An article including a support unit, the support unit including a support substrate and a bonding layer such that the bonding layer is bonded to a surface of the support substrate. Furthermore, a total thickness variation TTV across a width of the support unit is about 2.0 microns or less.

Abstract: An apparatus for supporting a process of debonding a carrier glass sheet and an ultrathin glass sheet. A suction plate includes a plurality of suction hole portions defining suction holes for suction-holding a glass laminate seated thereon and at least one recess portion defining at least one recess accommodating at least one device layer protruding from one surface of an ultrathin glass sheet of the glass laminate. A plurality of suction cups are fitted to the plurality of suction hole portions, respectively, such that the plurality of suction cups are elastically compressible, in response to contact pressure of the ultrathin glass sheet and the device layer. A vacuum pump is connected to the plurality of suction hole portions to apply negative pressure to the plurality of suction hole portions. A controller controls the vacuum pump to adjust the negative pressure applied to the plurality of suction hole portions.

Abstract: A debonding support device includes a suction plate including a support region for supporting a glass assembly, the support region including at least two suction regions applying different suction forces per unit area, the suction regions including a debonding initiation portion suction region for sucking a debonding initiation portion at which debonding of the glass assembly is to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area; a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and a controller.

Abstract: Methods and apparatus for bonding and/or de-bonding a flexible substrate to/from a carrier substrate include: moving a first plate, which supports a carrier substrate, relative to a second plate, which hold and releases a flexible substrate, in order to bond and/or de-bond the flexible substrate to/from the carrier substrate.

Abstract: Provided is a method for modifying a surface of a cyclic olefin copolymer, comprising: coating a compound of the following Chemical Formula 1 on the surface of a cyclic olefin copolymer substrate, irradiating UV light on the cyclic olefin copolymer substrate, and polymerizing a monomer on the cyclic olefin where X is H or F, and n is an integer of 1 to 6.

Abstract: Provided is a method for modifying a surface of a cyclic olefin copolymer, comprising: coating a compound of the following Chemical Formula 1 on the surface of a cyclic olefin copolymer substrate, irradiating UV light on the cyclic olefin copolymer substrate, and polymerizing a monomer on the cyclic olefin where X is H or F, and n is an integer of 1 to 6.