Patents by Inventor Bonan GAO

Bonan GAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon carbide-based combined temperature-pressure micro-electro-mechanical system (MEMS) sensor chip and preparation method thereof
    Patent number: 11686637
    Abstract: A silicon carbide-based micro-electro-mechanical system (MEMS) combined temperature-pressure sensor chip and a preparation thereof. The chip includes a peripheric pressure-measuring unit and a center temperature-measuring unit. The pressure-measuring unit includes a silicon carbide substrate with a raised island and a pressure sensitive diaphragm formed by etching the back of the substrate. The raised island and the pressure-sensitive diaphragm constitute a membrane-island structure. Four piezoresistive strips are arranged symmetrically along a circumferential direction of a root of the pressure-sensitive diaphragm and between the raised island and the pressure-sensitive diaphragm. The temperature-measuring unit includes the raised island and a thin-film thermocouple arranged thereon.
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: June 27, 2023
    Assignee: XI'AN JIAOTONG UNIVERSITY
    Inventors: Xudong Fang, Ziyan Fang, Chen Wu, Hao Sun, Libo Zhao, Bian Tian, Zhuangde Jiang, Wubin Deng, Bonan Gao, Junxia Wu, Songli Wang, Nan Zhu
  • SILICON CARBIDE-BASED COMBINED TEMPERATURE-PRESSURE MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) SENSOR CHIP AND PREPARATION METHOD THEREOF
    Publication number: 20220146352
    Abstract: A silicon carbide-based micro-electro-mechanical system (MEMS) combined temperature-pressure sensor chip and a preparation thereof. The chip includes a peripheric pressure-measuring unit and a center temperature-measuring unit. The pressure-measuring unit includes a silicon carbide substrate with a raised island and a pressure sensitive diaphragm formed by etching the back of the substrate. The raised island and the pressure-sensitive diaphragm constitute a membrane-island structure. Four piezoresistive strips are arranged symmetrically along a circumferential direction of a root of the pressure-sensitive diaphragm and between the raised island and the pressure-sensitive diaphragm. The temperature-measuring unit includes the raised island and a thin-film thermocouple arranged thereon.
    Type: Application
    Filed: January 25, 2022
    Publication date: May 12, 2022
    Inventors: Xudong FANG, Ziyan FANG, Chen WU, Hao SUN, Libo ZHAO, Bian TIAN, Zhuangde JIANG, Wubin DENG, Bonan GAO, Junxia WU, Songli WANG, Nan ZHU