Patents by Inventor Bong-Jin Yum

Bong-Jin Yum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measurement system for correcting overlay measurement error
    Patent number: 8117001
    Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods.
    Type: Grant
    Filed: February 4, 2011
    Date of Patent: February 14, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Moon-Sang Lee, Bong-Jin Yum, Hong-Seok Kim, Kwan-Woo Kim, Seung-Hyun Kim, Chan-Hoon Park
  • MEASUREMENT SYSTEM FOR CORRECTING OVERLAY MEASUREMENT ERROR
    Publication number: 20110125440
    Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods.
    Type: Application
    Filed: February 4, 2011
    Publication date: May 26, 2011
    Inventors: Moon-Sang Lee, Bong-Jin Yum, Hong-Seok Kim, Kwan-Woo Kim, Seung-Hyun Kim, Chan-Hoon Park
  • Measurement system for correcting overlay measurement error
    Patent number: 7908105
    Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model, is disclosed. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: March 15, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Moon-Sang Lee, Bong-Jin Yum, Hong-Seok Kim, Kwan-Woo Kim, Seung-Hyun Kim, Chan-Hoon Park
  • MEASUREMENT SYSTEM FOR CORRECTING OVERLAY MEASUREMENT ERROR
    Publication number: 20080228435
    Abstract: A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods.
    Type: Application
    Filed: February 28, 2008
    Publication date: September 18, 2008
    Applicants: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY, SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Moon-Sang LEE, Bong-Jin YUM, Hong-Seok KIM, Kwan-Woo KIM, Seung-Hyun KIM, Chan-Hoon PARK