Abstract: The present invention disclosed herein relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus capable of performing substrate processing such as deposition, etching, and heat processing on a plurality of substrates. The present invention discloses a substrate processing apparatus including a reaction tube having a processing space, in which a plurality of substrates are accommodated to perform substrate processing, a nozzle installation part protruding outward from a portion of a side surface of the reaction tube to provide a portion of an outer surface of the reaction tube, and a plurality of gas injection nozzles disposed along a circumference of each of the substrate in a direction perpendicular to the nozzle installation part to inject a process gas into the reaction tube, wherein the nozzle installation part comprises a plurality of insertion parts corresponding to the gas injection nozzles.

Abstract: According to the present invention, part of carbon dioxide heated by a heater is supplied to a dry gas seal portion of a compressor so that a device for pressurizing and heating a seal gas is not additionally required, configuration can be simplified and cost can be reduced. In addition, a seal gas flow path includes a low-temperature seal gas flow path and a high-temperature seal gas flow path so that, in an initial driving mode, carbon dioxide heated by a high-temperature portion of the heater is used as a seal gas and in a turbine-driving mode, carbon dioxide heated by a low-temperature portion of the heater is used as a seal gas and thus a more efficient operation can be performed.

Abstract: According to the present invention, part of carbon dioxide heated by a heater is supplied to a dry gas seal portion of a compressor so that a device for pressurizing and heating a seal gas is not additionally required, configuration can be simplified and cost can be reduced. In addition, a seal gas flow path includes a low-temperature seal gas flow path and a high-temperature seal gas flow path so that, in an initial driving mode, carbon dioxide heated by a high-temperature portion of the heater is used as a seal gas and in a turbine-driving mode, carbon dioxide heated by a low-temperature portion of the heater is used as a seal gas and thus a more efficient operation can be performed.

Abstract: An optical fiber amplifier is disclosed including: an optical line through which an optical signal is transmitted; a rare-earth-doped fiber, doped with a predetermined rare earth ion, being set on the optical line; a pumping light beam source for generating a pumping light beam having a predetermined wavelength; a first multiplexer for coupling the pumping light beam to the optical line; a second multiplexer for dividing the pumping light beam outputted from the rare-earth-doped fiber; and pumping light beam looping means for looping the pumping light beam divided by the second multiplexer back to the rare-earth-doped fiber. The residual pumping light beam outputted from the rare-earth-doped pumping light beam is looped back by the feedback loop or reflection loop, to be reprovided to the rare-earth-doped fiber through the multiplexer.