Patents by Inventor Boogyeong Zoo

Boogyeong Zoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE
    Publication number: 20230176487
    Abstract: A substrate support system is provided that includes: a support part configured to support a bottom surface of a substrate on a support plane; a moveable part moveable between a retracted position, in which a top end of the moveable part is below the support plane, and an extended position, in which the top end of the moveable part is above the support plane, such that the top end supports the bottom surface of the substrate above the support plane in the extended position; and a measurement system configured to measure a time taken for the moveable part to move from the retracted position to the extended position, to compare the measured time with a reference time, and to generate a signal when the measured time deviates from the reference time by more than a predetermined amount.
    Type: Application
    Filed: May 3, 2021
    Publication date: June 8, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Rogier Sebastiaan GILIJAMSE, Johan Gertrudis Cornelis KUNNEN, Marco Adrianus Peter VAN DEN HEUVEL, Boogyeong Zoo