Patents by Inventor Bor-Ren Chen

Bor-Ren Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer cleaning process
    Patent number: 7691206
    Abstract: The invention is directed to a wafer cleaning process for being applied on a wafer after an etching process is performed on the wafer, wherein the wafer has a wafer center, a wafer radius and a wafer circumference. The wafer cleaning process comprises a step of dispensing a cleaning solution over the wafer by using a dispenser while the dispenser is moving back and forth along a swing path over the wafer around the wafer center, wherein the wafer center is projected to a midpoint of the swing path.
    Type: Grant
    Filed: September 8, 2005
    Date of Patent: April 6, 2010
    Assignee: United Microelectronics Corp.
    Inventor: Bor-Ren Chen
  • Wafer cleaning process
    Publication number: 20070054491
    Abstract: The invention is directed to a wafer cleaning process for being applied on a wafer after an etching process is performed on the wafer, wherein the wafer has a wafer center, a wafer radius and a wafer circumference. The wafer cleaning process comprises a step of dispensing a cleaning solution over the wafer by using a dispenser while the dispenser is moving back and forth along a swing path over the wafer around the wafer center, wherein the wafer center is projected to a midpoint of the swing path.
    Type: Application
    Filed: September 8, 2005
    Publication date: March 8, 2007
    Inventor: Bor-Ren Chen