Patents by Inventor Boris Brodmann

Boris Brodmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for the contactless assessment of the surface quality of a wafer
    Patent number: 10180316
    Abstract: A method and a device for contactless assessment of the surface quality of a workpiece (W) according to the angle-resolved scattered light measuring technique comprises an optical sensor (10) which illuminates a measuring spot (14). The intensity of the radiation which is reflected back is detected by means of a line sensor (16), and an intensity characteristic value (Ig) is determined therefrom. A horizontal initial rotation angle (?) at which the intensity characteristic value is at a maximum is determined. In a measuring operating mode, surface characteristic values are calculated taking into account this initial rotational angle (?). The measuring method is defined by extremely high lateral and vertical spatial resolution, extending into the subnanometer range, and by a high measuring speed.
    Type: Grant
    Filed: August 25, 2016
    Date of Patent: January 15, 2019
    Assignee: Brodmann Technologies GmbH
    Inventors: Rainer Brodmann, Boris Brodmann
  • METHOD AND DEVICE FOR THE CONTACTLESS ASSESSMENT OF THE SURFACE QUALITY OF A WAFER
    Publication number: 20180245911
    Abstract: A method and a device for contactless assessment of the surface quality of a workpiece (W) according to the angle-resolved scattered light measuring technique comprises an optical sensor (10) which illuminates a measuring spot (14). The intensity of the radiation which is reflected back is detected by means of a line sensor (16), and an intensity characteristic value (Ig) is determined therefrom. A horizontal initial rotation angle (?) at which the intensity characteristic value is at a maximum is determined. In a measuring operating mode, surface characteristic values are calculated taking into account this initial rotational angle (?). The measuring method is defined by extremely high lateral and vertical spatial resolution, extending into the subnanometer range, and by a high measuring speed.
    Type: Application
    Filed: August 25, 2016
    Publication date: August 30, 2018
    Applicant: Brodmann Technologies GmbH
    Inventors: Rainer Brodmann, Boris Brodmann