Patents by Inventor Boris Fuksshimov

Boris Fuksshimov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer
    Patent number: 6855031
    Abstract: In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also included in the polishing device is a slurry supply line adapted to supply the polishing slurry from the source of polishing slurry to the polishing pad. The polishing device includes a pressure transducer installed along the slurry supply line and adapted to detect a pressure inside the slurry supply line. Numerous other aspects are provided.
    Type: Grant
    Filed: February 7, 2003
    Date of Patent: February 15, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Boris Fuksshimov, Jeff P Rudd, Charles C Garretson, Brian J Brown
  • Method and device to remove unwanted material from the edge region of a workpiece
    Publication number: 20040132295
    Abstract: A method of removing edge material from a workpiece includes the steps of supplying an etch solution to create an etchant bead at an opening of an edge removal device, contacting the etchant bead with an edge region of the workpiece, and rotating the workpiece to remove the edge material from the workpiece. In one aspect, the step of supplying the etch solution includes the step of maintaining the etchant bead at the opening of the edge removal device. In another aspect, the edge removal device includes a cavity having the opening and the step of contacting the etchant bead includes inserting the edge region of the workpiece into the cavity.
    Type: Application
    Filed: October 31, 2003
    Publication date: July 8, 2004
    Inventors: Bulent M. Basol, Homayoun Talieh, Boris I. Govzman, Boris Fuksshimov
  • Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer
    Publication number: 20030166378
    Abstract: In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also included in the polishing device is a slurry supply line adapted to supply the polishing slurry from the source of polishing slurry to the polishing pad. The polishing device includes a pressure transducer installed along the slurry supply line and adapted to detect a pressure inside the slurry supply line. Numerous other aspects are provided.
    Type: Application
    Filed: February 7, 2003
    Publication date: September 4, 2003
    Inventors: Boris Fuksshimov, Jeff Rudd, Charles C. Garretson, Brian J. Brown
  • Combined slurry dispenser and rinse arm
    Patent number: 6280299
    Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
    Type: Grant
    Filed: February 16, 2000
    Date of Patent: August 28, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Daniel Kennedy, Boris Fuksshimov, Victor Belitsky, Boris Fishkin, Kyle Brown, Tom Osterheld, Jeff Beeler, Ginetto Addiego
  • Combined slurry dispenser and rinse arm and method of operation
    Patent number: 6139406
    Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
    Type: Grant
    Filed: June 24, 1997
    Date of Patent: October 31, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Daniel Kennedy, Boris Fuksshimov, Victor Belitsky, Boris Fishkin, Kyle Brown, Tom Osterheld, Jeff Beeler, Ginetto Addiego