Patents by Inventor Boris Golberg

Boris Golberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10481101
    Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: November 19, 2019
    Assignee: Applied Materials Israel Ltd.
    Inventors: Haim Feldman, Boris Golberg, Ido Dolev
  • Publication number: 20190184163
    Abstract: Systems and methods for controlling a tissue of a subject using applied pulsed electric fields. The system includes an electrode assembly configured to engage a skin tissue of a subject to deliver a series of electric field pulses to the skin tissue and a user input configured to receive an operational instruction for the series of electric field pulses. The system also includes at least one processor configured to access the operational instruction received by the user input and, using the operational instruction, create an electric field profile to be generated by the electrode assembly about the skin tissue of the subject to control a fibroblast characteristic while preserving a vascular perfusion in at least a portion of the skin tissue. The processor is also caused to control the electrode assembly using the electric field profile to deliver the series of electric field pulses to control the fibroblast characteristic.
    Type: Application
    Filed: December 21, 2018
    Publication date: June 20, 2019
    Inventors: Alexander Golberg, Martin L. Yarmush, Robert L. Sheridan, William Gerald Austen, G. Felix Broelsch, Boris Rubinsky, Michael Belkin
  • Patent number: 10177048
    Abstract: A system for inspecting and reviewing a sample, the system may include a chamber that is arranged to receive the sample and to maintain vacuum within the chamber during at least a scan period; an inspection unit; a review unit; and a mechanical stage for moving the sample, according to a scan pattern and during the scan period, in relation to the inspection unit and the review unit while a spatial relationship between the inspection unit and the review unit remains unchanged; wherein the inspection unit is arranged to detect, during the scan period, multiple suspected defects of the sample; and wherein the review unit is arranged to (a) receive, during the scan period, information about the multiple suspected defects; and (b) locate, during the scan period and in response to the information about the multiple suspected defects, at least one actual defect.
    Type: Grant
    Filed: March 4, 2015
    Date of Patent: January 8, 2019
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Juergen Frosien, Jacob Levin, Igor Krivts (Krayvitz), Yoram Uziel, Boris Golberg
  • Patent number: 10054551
    Abstract: An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detectio
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: August 21, 2018
    Assignee: Applied Materials Israel Ltd.
    Inventors: Boris Golberg, Ron Naftali
  • Publication number: 20180209915
    Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
    Type: Application
    Filed: January 23, 2017
    Publication date: July 26, 2018
    Inventors: Haim Feldman, Boris Golberg, Ido Dolev
  • Patent number: 9958670
    Abstract: A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: May 1, 2018
    Assignee: Applied Materials Israel Ltd.
    Inventors: Ron Naftail, Boris Golberg, Rami Elichai
  • Publication number: 20180081166
    Abstract: A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
    Type: Application
    Filed: September 20, 2016
    Publication date: March 22, 2018
    Inventors: Ron Naftail, Boris Golberg, Rami Elichai
  • Publication number: 20170307539
    Abstract: An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detectio
    Type: Application
    Filed: April 20, 2016
    Publication date: October 26, 2017
    Inventors: Boris Golberg, Ron Naftali
  • Publication number: 20160260642
    Abstract: A system for inspecting and reviewing a sample, the system may include a chamber that is arranged to receive the sample and to maintain vacuum within the chamber during at least a scan period; an inspection unit; a review unit; and a mechanical stage for moving the sample, according to a scan pattern and during the scan period, in relation to the inspection unit and the review unit while a spatial relationship between the inspection unit and the review unit remains unchanged; wherein the inspection unit is arranged to detect, during the scan period, multiple suspected defects of the sample; and wherein the review unit is arranged to (a) receive, during the scan period, information about the multiple suspected defects; and (b) locate, during the scan period and in response to the information about the multiple suspected defects, at least one actual defect.
    Type: Application
    Filed: March 4, 2015
    Publication date: September 8, 2016
    Inventors: Juergen Frosien, Jacob Levin, Igor Krivts (Krayvitz), Yoram Uziel, Boris Golberg
  • Patent number: 9395266
    Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: July 19, 2016
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer
  • Publication number: 20150300913
    Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
    Type: Application
    Filed: December 4, 2014
    Publication date: October 22, 2015
    Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer
  • Patent number: 7403336
    Abstract: A method and system are presented for use in imaging broadband light. A plurality of substantially narrowband light components of the broadband light are passed through an array of spectral imaging modules. Each of the spectral imaging modules is configured for imaging light of a respective substantially narrow spectral band with minimal aberrations. This technique provides for producing an image with minimal aberrations over the entire spectral range of the broadband light.
    Type: Grant
    Filed: October 30, 2006
    Date of Patent: July 22, 2008
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Boris Golberg, Benjamin Cohen
  • Publication number: 20080100917
    Abstract: A method and system are presented for use in imaging broadband light. A plurality of substantially narrowband light components of the broadband light are passed through an array of spectral imaging modules. Each of the spectral imaging modules is configured for imaging light of a respective substantially narrow spectral band with minimal aberrations. This technique provides for producing an image with minimal aberrations over the entire spectral range of the broadband light.
    Type: Application
    Filed: October 30, 2006
    Publication date: May 1, 2008
    Applicant: Applied Materials, Israel, Ltd.
    Inventors: BORIS GOLBERG, Benjamin Cohen
  • Patent number: 7315364
    Abstract: Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.
    Type: Grant
    Filed: May 5, 2005
    Date of Patent: January 1, 2008
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Adam Baer, Boris Golberg
  • Patent number: 7053395
    Abstract: A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
    Type: Grant
    Filed: July 11, 2003
    Date of Patent: May 30, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Ron Naftali, Boris Golberg, Silviu Reinhorn
  • Publication number: 20060087648
    Abstract: Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.
    Type: Application
    Filed: May 5, 2005
    Publication date: April 27, 2006
    Inventors: Adam Baer, Boris Golberg
  • Patent number: 6853475
    Abstract: A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
    Type: Grant
    Filed: July 11, 2003
    Date of Patent: February 8, 2005
    Assignee: Applied Materials INC
    Inventors: Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Ron Naftali, Boris Golberg, Silviu Reinhorn
  • Patent number: 6809808
    Abstract: A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: October 26, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Ron Naftali, Boris Golberg, Silviu Reinhorn
  • Patent number: 6750436
    Abstract: An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.
    Type: Grant
    Filed: July 9, 2002
    Date of Patent: June 15, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Haim Feldman, Boris Golberg, Alexander Libinson
  • Publication number: 20040080740
    Abstract: A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
    Type: Application
    Filed: July 11, 2003
    Publication date: April 29, 2004
    Applicant: APPLIED MATERIALS, INC
    Inventors: Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Ron Naftali, Boris Golberg, Silviu Reinhorn