Patents by Inventor Boris Goldberg
Boris Goldberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11057538Abstract: The present invention discloses methods and systems for tagged-signal verification.Type: GrantFiled: December 31, 2019Date of Patent: July 6, 2021Inventors: Boris Goldberg, Vittaly Tavor
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Publication number: 20210203803Abstract: The present invention discloses methods and systems for tagged-signal verification.Type: ApplicationFiled: December 31, 2019Publication date: July 1, 2021Inventors: Boris Goldberg, Vittaly Tavor
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Patent number: 9244290Abstract: An optical system having coherence reduction capabilities includes a light source for generating a first light pulse; an asymmetrical pulse stretcher arranged to receive the first light pulse and to generate multiple light pulses, during a pulse sequence generation period, wherein the asymmetrical pulse stretcher includes multiple optical components which define a loop and a condenser lens is located between the asymmetrical pulse stretcher and an object, for directing the multiple pulses toward an area on the object At least two optical components of the multiple optical components are positioned in an almost symmetrical manner in relation to each other and introduce a coherence-related difference between at least two pulses of the multiple pulses. The pulse sequence generation period does not exceed a response period of a detector.Type: GrantFiled: January 6, 2011Date of Patent: January 26, 2016Assignee: Applied Materials Israel Ltd.Inventors: Roman Vander, Shmuel Mangan, Boris Goldberg, Amir Moshe Sagiv
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Publication number: 20140036942Abstract: An optical system having coherence reduction capabilities includes a light source for generating a first light pulse; an asymmetrical pulse stretcher arranged to receive the first light pulse and to generate multiple light pulses, during a pulse sequence generation period, wherein the asymmetrical pulse stretcher includes multiple optical components which define a loop and a condenser lens is located between the asymmetrical pulse stretcher and an object, for directing the multiple pulses toward an area on the object At least two optical components of the multiple optical components are positioned in an almost symmetrical manner in relation to each other and introduce a coherence-related difference between at least two pulses of the multiple pulses. The pulse sequence generation period does not exceed a response period of a detector.Type: ApplicationFiled: January 6, 2011Publication date: February 6, 2014Applicant: APPLIED MATERIALS ISRAEL LTDInventors: Roman Vander, Shmuel Mangan, Boris Goldberg, Amir Moshe Sagiv
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Patent number: 8213024Abstract: A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.Type: GrantFiled: July 31, 2007Date of Patent: July 3, 2012Assignee: Applied Materials Israel, Ltd.Inventors: Shmuel Mangan, Boris Goldberg, Ishai Schwarzband, On Haran, Michael Ben-Yishay, Amir Sagiv, Chaim Braude
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Patent number: 7460221Abstract: System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.Type: GrantFiled: January 22, 2007Date of Patent: December 2, 2008Assignee: Applied Materials, Inc.Inventors: Boris Goldberg, Ron Naftali
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Publication number: 20080074659Abstract: A system, method and computer readable medium for reticle evaluation, the method includes: (i) obtaining, during an imaging process, multiple images of the reticle under different polarization and optionally interferometric conditions; and (ii) generating an output aerial image in response to (i) the multiple images and (ii) differences between the imaging process and an exposure process; wherein during the exposure process an image of the reticle is projected onto a wafer.Type: ApplicationFiled: July 31, 2007Publication date: March 27, 2008Inventors: Shmuel Mangan, Boris Goldberg, Ishai Schwarzband, On Haran, Michael Ben-Yishay, Amir Sagiv
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Patent number: 7268343Abstract: System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.Type: GrantFiled: February 25, 2005Date of Patent: September 11, 2007Assignee: Applied Materials, Inc.Inventors: Boris Goldberg, Ron Naftali
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Publication number: 20070195315Abstract: System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.Type: ApplicationFiled: January 22, 2007Publication date: August 23, 2007Inventors: Boris Goldberg, Ron Naftali
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Patent number: 7173694Abstract: System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.Type: GrantFiled: February 28, 2006Date of Patent: February 6, 2007Assignee: Applied Materials, Inc.Inventors: Boris Goldberg, Ron Naftali
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Publication number: 20060152717Abstract: System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.Type: ApplicationFiled: February 28, 2006Publication date: July 13, 2006Inventors: Boris Goldberg, Ron Naftali
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Patent number: 7053999Abstract: System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.Type: GrantFiled: March 21, 2002Date of Patent: May 30, 2006Assignee: Applied Materials, Inc.Inventors: Boris Goldberg, Ron Naftali
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Publication number: 20050200839Abstract: System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.Type: ApplicationFiled: February 25, 2005Publication date: September 15, 2005Inventors: Boris Goldberg, Ron Naftali
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Patent number: 6943898Abstract: Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.Type: GrantFiled: January 28, 2003Date of Patent: September 13, 2005Assignee: Applied Materials Israel, Ltd.Inventors: Alexander Libinson, Haim Feldman, Daniel Some, Boris Goldberg
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Patent number: 6914670Abstract: Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.Type: GrantFiled: September 18, 2003Date of Patent: July 5, 2005Assignee: Applied Materials, Inc.Inventors: Gilad Almogy, Boris Goldberg, Ron Naftali
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Patent number: 6882417Abstract: System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.Type: GrantFiled: March 21, 2002Date of Patent: April 19, 2005Assignee: Applied Materials, Inc.Inventors: Boris Goldberg, Ron Naftali
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Patent number: 6853446Abstract: A variable illumination angle inspection system is provided, including a light source providing a light beam and a scanner imparting scanning deflection to the light beam to provide a scanning beam approaching a substrate at a first angle. A deflection element is selectively insertable into an optical path of the scanning beam to deflect the scanning beam so as to cause the scanning beam to approach the substrate at a second angle.Type: GrantFiled: August 16, 2000Date of Patent: February 8, 2005Assignee: Applied Materials, Inc.Inventors: Gilad Almogy, Hadar Mazaki, Zvi Howard Phillip, Silviu Reinhorn, Boris Goldberg, Daniel I. Some
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Patent number: 6788445Abstract: A polygon scanning system and method is provided wherein two or more light beams impinge at different incident angles on a polygon facet and are sequentially used for scanning the surface of a substrate as the polygon is rotated. Embodiments include a system comprising a polygon having a reflective facet, a rotation mechanism for rotating the polygon, and a light source for directing a plurality of light beams to impinge on the facet such that each light beam impinges on the facet at a different incident angle. Each light beam is reflected by the facet to scan a particular portion of a surface of a substrate during a respective time interval when the rotation mechanism is rotating the polygon. Each of the plurality of light beams is reflected onto the substrate surface using a respective portion of the facet surface, such that the sum of the respective portions of the facet surface used to reflect the light beams is a very large percentage of the total surface area.Type: GrantFiled: January 14, 2002Date of Patent: September 7, 2004Assignee: Applied Materials, Inc.Inventors: Boris Goldberg, Silviu Reinhorn
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Patent number: 6657714Abstract: Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.Type: GrantFiled: January 15, 2002Date of Patent: December 2, 2003Assignee: Applied Materials, Inc.Inventors: Gilad Almogy, Boris Goldberg, Ron Naftali
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Publication number: 20030210402Abstract: Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.Type: ApplicationFiled: January 28, 2003Publication date: November 13, 2003Applicant: Applied Materials Israel Ltd.Inventors: Alexander Libinson, Haim Feldman, Daniel Some, Boris Goldberg