Patents by Inventor Boris Korneev

Boris Korneev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser-sustained plasma generation in supersonic gas jets
    Patent number: 12538408
    Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.
    Type: Grant
    Filed: June 28, 2024
    Date of Patent: January 27, 2026
    Assignee: KLA Corporation
    Inventors: Oleg Khodykin, Boris Korneev, Ilya Bezel, Andrey Zakirov, Andrey Evgenievich Stepanov, Vitaliy Rerikh, Leonid Borisovich Zvedenuk
  • LASER-SUSTAINED PLASMA GENERATION IN SUPERSONIC GAS JETS
    Publication number: 20250016905
    Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.
    Type: Application
    Filed: June 28, 2024
    Publication date: January 9, 2025
    Inventors: Oleg Khodykin, Boris Korneev, Ilya Bezel, Andrey Zakirov, Andrey Evgenievich Stepanov, Vitaliy Rerikh, Leonid Borisovich Zvedenuk