Patents by Inventor Boris Rozensvaig

Boris Rozensvaig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope and a method for overlay monitoring
    Patent number: 11646173
    Abstract: A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
    Type: Grant
    Filed: July 7, 2021
    Date of Patent: May 9, 2023
    Assignee: Applied Materials Israel Ltd.
    Inventors: Itay Asulin, Emil Weisz, Eitam Yitzchak Vinegrad, Menachem Lapid, Boris Rozensvaig
  • SCANNING ELECTRON MICROSCOPE AND A METHOD FOR OVERLAY MONITORING
    Publication number: 20210335569
    Abstract: A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
    Type: Application
    Filed: July 7, 2021
    Publication date: October 28, 2021
    Inventors: Itay Asulin, Emil Weisz, Eitam Yitzchak Vinegrad, Menachem Lapid, Boris Rozensvaig