Patents by Inventor Boris Vasilyevich Potapkin

Boris Vasilyevich Potapkin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11776804
    Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: October 3, 2023
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin
  • Patent number: 11690162
    Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: June 27, 2023
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Andrey Evgenievich Stepanov, Leonid Borisovich Zvedenuk, Yuriy Gennadievich Kutsenko, Boris Vasilyevich Potapkin, Sumeet Kumar
  • Patent number: 11596048
    Abstract: A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizontal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.
    Type: Grant
    Filed: September 17, 2020
    Date of Patent: February 28, 2023
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Maksim Alexandrovich Deminskii, Boris Vasilyevich Potapkin
  • Publication number: 20220344146
    Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
    Type: Application
    Filed: March 16, 2022
    Publication date: October 27, 2022
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin
  • Publication number: 20210321508
    Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
    Type: Application
    Filed: April 6, 2021
    Publication date: October 14, 2021
    Inventors: Ilya Bezel, Andrey Evgenievich Stepanov, Leonid Borisovich Zvedenuk, Yuriy Gennadievich Kutsenko, Boris Vasilyevich Potapkin, Sumeet Kumar
  • Publication number: 20210092826
    Abstract: A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizonal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.
    Type: Application
    Filed: September 17, 2020
    Publication date: March 25, 2021
    Applicant: KLA Corporation
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Maksim Alexandrovich Deminskii, Boris Vasilyevich Potapkin