Patents by Inventor Boris Yendler

Boris Yendler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH TEMPERATURE CATHODE FOR PLASMA ETCHING
    Publication number: 20090014323
    Abstract: The present invention generally is a cathode suitable for use in high temperature plasma etch applications. In one embodiment, the cathode includes a ceramic electrostatic chuck secured to a base. The base has cooling conduits formed therein. A rigid support ring is disposed between the chuck and the base, thereby maintaining the chuck and the base in a spaced-apart relation.
    Type: Application
    Filed: July 11, 2008
    Publication date: January 15, 2009
    Inventors: Boris Yendler, Alexander Matyushkin, Denis Koosau, Glen Egami
  • HEAT TRANSFER ASSEMBLY
    Publication number: 20070079761
    Abstract: A heat transfer assembly having a heat spreading member sandwiched between a heat source and a heat sink is disclosed. The heat sink, the heat spreading member, and the heat source are pressed against the bottom of a substrate support plate by a bias member.
    Type: Application
    Filed: September 27, 2006
    Publication date: April 12, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Boris Yendler, Alexander Matyushkin