Patents by Inventor Bosky SONI

Bosky SONI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TUNGSTEN CMP COMPOSITION INCLUDING A SULFUR CONTAINING ANIONIC SURFACTANT
    Publication number: 20240101865
    Abstract: A chemical mechanical polishing composition for tungsten CMP consists of, consists essentially of, or comprises a liquid carrier, cationic abrasive particles dispersed therein, an iron-containing accelerator, a tungsten etch inhibitor, a sulfur containing anionic surfactant, and has a pH of less than about 5.
    Type: Application
    Filed: September 19, 2023
    Publication date: March 28, 2024
    Inventors: Na ZHANG, Bosky SONI