Patents by Inventor Boudewijn Gijsbert Sluijk

Boudewijn Gijsbert Sluijk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for the treatment of wafers
    Patent number: 6663332
    Abstract: Installation for treatment of wafers in a reactor. To that end a series of wafers is placed in a wafer rack and fed into the reactor. Transport into and out of the reactor, which is sited in an enclosed chamber, takes place with the aid of conveyor means. The wafers are transferred from the wafer rack to one or more cassettes. During this operation the wafer rack is always in the vertical position, that is to say the wafers are horizontal. The same preferably also applies to the cassettes, so that the wafers remain horizontal throughout the entire process.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: December 16, 2003
    Assignee: ASM International N.V.
    Inventors: Boudewijn Gijsbert Sluijk, Christianus Gerardus Maria De Ridder