Patents by Inventor Boudewjin Weijert Herman Jan VAN DER KROON

Boudewjin Weijert Herman Jan VAN DER KROON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL
    Publication number: 20230005699
    Abstract: Disclosed herein is an aperture body for passing a portion of a charged particle beam propagating along a beam path comprising an axis, the aperture body comprising: an up-beam facing surface; a chamber portion comprising an up-beam end, a down-beam end and an up-beam plate, wherein the up-beam plate extends radially inwards from the up-beam end and the up-beam plate is configured to define an entrance opening around the beam path; wherein: the up-beam facing surface extends radially inwards from the down-beam end; the up-beam facing surface comprises an aperture portion that is configured to define an opening around the beam path; and the opening defined by the aperture portion is smaller than the entrance opening.
    Type: Application
    Filed: September 9, 2022
    Publication date: January 5, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Christiaan OTTEN, Christian TEUNISSEN, Boudewjin Weijert Herman Jan VAN DER KROON, Jurgen VAN SOEST