Abstract: Method for performing signal processing for an optical microphone. First and second signals corresponding to at least two beams may be generated or received. The first and second signals may be complementary, and may be based on signals provided by one or more photo detectors that receive the at least two beams after the beams return from a sensing structure. The first signal and the second signal may be subtracted to produce a third signal. A position of the sensing structure may be adjusted to cause the third signal to reach a first value, where the adjusting may be performed based on the third signal, and an audio output signal may be provided based on the third signal.

Abstract: An optical microphone that may include a first substrate with one or more acoustic entry ports and a die over the one or more acoustic entry ports. The die may include a sensing structure for detecting acoustic vibrations received via the acoustic entry port(s) and may form a first cavity between the first substrate and the sensing structure. The microphone may include a light source within the first cavity, which may transmit laser light. The optical microphone may include photo detector(s) within the first cavity. The one or more photodetectors may be configured to receive the laser light after reflection from the sensing diaphragm to measure the acoustic vibrations of the sensing diaphragm. The microphone may also include a circuit and a lid, where the die, light source, photo detectors, and circuit are comprised within the cavity of the microphone. The circuit may perform signal processing signals from the photodetector(s).

Abstract: An optical microphone that may include a first substrate with one or more acoustic entry ports and a die over the one or more acoustic entry ports. The die may include a sensing structure for detecting acoustic vibrations received via the acoustic entry port(s) and may form a first cavity between the first substrate and the sensing structure. The microphone may include a light source within the first cavity, which may transmit laser light. The optical microphone may include photo detector(s) within the first cavity. The one or more photodetectors may be configured to receive the laser light after reflection from the sensing diaphragm to measure the acoustic vibrations of the sensing diaphragm. The microphone may also include a circuit and a lid, where the die, light source, photo detectors, and circuit are comprised within the cavity of the microphone. The circuit may perform signal processing signals from the photodetector(s).

Abstract: An optical microphone that may include a first substrate with one or more acoustic entry ports and a die over the one or more acoustic entry ports. The die may include a sensing structure for detecting acoustic vibrations received via the acoustic entry port(s) and may form a first cavity between the first substrate and the sensing structure. The microphone may include a light source within the first cavity, which may transmit laser light. The optical microphone may include photo detector(s) within the first cavity. The one or more photodetectors may be configured to receive the laser light after reflection from the sensing diaphragm to measure the acoustic vibrations of the sensing diaphragm. The microphone may also include a circuit and a lid, where the die, light source, photo detectors, and circuit are comprised within the cavity of the microphone. The circuit may perform signal processing signals from the photodetector(s).