Patents by Inventor Bradford G. Ackerman

Bradford G. Ackerman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silica-based light-weight EUV lithography stages
    Patent number: 6542224
    Abstract: A lithographic stage includes a platen having a top face and a bottom face and a holder for holding an optical component on the top face of the platen. The platen is made of a light-weight material such as high purity fused silica or ultra low expansion glass. The bottom face of the platen may further include means for connecting to a positioning device in an extreme ultraviolet lithography system.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: April 1, 2003
    Assignee: Corning Incorporated
    Inventors: Bradford G. Ackerman, Bradley F. Bowden, Claude L. Davis, Jr., Kenneth E. Hrdina
  • Method for producing titania-doped fused silica glass
    Publication number: 20020157421
    Abstract: A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass.
    Type: Application
    Filed: April 27, 2001
    Publication date: October 31, 2002
    Inventors: Bradford G. Ackerman, Kenneth E. Hrdina, Lisa A. Moore, Nikki J. Russo, C. Charles Yu
  • Silica-based light-weight EUV lithography stages
    Publication number: 20020044267
    Abstract: A lithographic stage includes a platen having a top face and a bottom face and a holder for holding an optical component on the top face of the platen. The platen is made of a light-weight material such as high purity fused silica or ultra low expansion glass. The bottom face of the platen may further include means for connecting to a positioning device in an extreme ultraviolet lithography system.
    Type: Application
    Filed: August 30, 2001
    Publication date: April 18, 2002
    Inventors: Bradford G. Ackerman, Bradley F. Bowden, Claude L. Davis, Kenneth E. Hrdina