Patents by Inventor Bradley B. Engel

Bradley B. Engel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for scribing a semiconductor wafer while controlling scribing forces
    Patent number: 7165331
    Abstract: A system for controlling scribing forces when scribing a semiconductor wafer includes supporting a scribe tool on an air bearing shaft. An encoder reads an encoder scale attached to the air bearing shaft and transport structure moves the tool support structure up or down to control the scribing force responsive to signals from the encoder.
    Type: Grant
    Filed: May 24, 2005
    Date of Patent: January 23, 2007
    Assignee: Micro Processing Technology, Inc.
    Inventors: Paul C. Lindsey, Jr., Bradley B. Engel