Patents by Inventor Bradley C. Kaanta
Bradley C. Kaanta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11746004Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.Type: GrantFiled: February 9, 2022Date of Patent: September 5, 2023Assignee: Analog Devices, Inc.Inventors: Charles Blackmer, Jeffrey A. Gregory, Nikolay Pokrovskiy, Bradley C. Kaanta
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Publication number: 20220162059Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.Type: ApplicationFiled: February 9, 2022Publication date: May 26, 2022Applicant: Analog Devices, Inc.Inventors: Charles Blackmer, Jeffrey A. Gregory, Nikolay Pokrovskiy, Bradley C. Kaanta
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Patent number: 11279614Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.Type: GrantFiled: June 28, 2019Date of Patent: March 22, 2022Assignee: Analog Devices, Inc.Inventors: Charles Blackmer, Jeffrey A. Gregory, Nikolay Pokrovskiy, Bradley C. Kaanta
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Publication number: 20200407217Abstract: Microelectromechanical system (MEMS) inertial sensors exhibiting reduced parasitic capacitance are described. The reduction in the parasitic capacitance may be achieved by forming localized regions of thick dielectric material. These localized regions may be formed inside trenches. Formation of trenches enables an increase in the vertical separation between a sense capacitor and the substrate, thereby reducing the parasitic capacitance in this region. The stationary electrode of the sense capacitor may be placed between the proof mass and the trench. The trench may be filled with a dielectric material. Part of the trench may be filled with air, in some circumstances, thereby further reducing the parasitic capacitance. These MEMS inertial sensors may serve, among other types of inertial sensors, as accelerometers and/or gyroscopes. Fabrication of these trenches may involve lateral oxidation, whereby columns of semiconductor material are oxidized.Type: ApplicationFiled: June 28, 2019Publication date: December 31, 2020Applicant: Analog Devices, Inc.Inventors: Charles Blackmer, Jeffrey A. Gregory, Nikolay Pokrovskiy, Bradley C. Kaanta
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Patent number: 10427931Abstract: A capacitive microelectromechanical systems (MEMS) sensor is provided, having conductive coatings on opposing surfaces of capacitive structures. The capacitive structures may be formed of silicon, and the conductive coating is formed of tungsten in some embodiments. The structure is formed in some embodiments by first releasing the silicon structures and then selectively coating them in the conductive material. In some embodiments, the coating may result in encapsulating the capacitive structures.Type: GrantFiled: June 28, 2017Date of Patent: October 1, 2019Assignee: Analog Devices, Inc.Inventor: Bradley C. Kaanta
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Patent number: 10131538Abstract: A MEMS device has a substrate with a structure surface and an opposing exterior surface, microstructure formed on the structure surface of the substrate, and a cap coupled with the substrate to form a hermetically sealed interior chamber containing the microstructure. The substrate forms a trench extending from, and being open to, the opposing exterior surface to produce a sensor region and a second region. Specifically, the second region is radially outward of the sensor region. The MEMS device also has a spring integrally formed at least in part within the trench to mechanically connect the sensor region and the second region, and other structure integral with the substrate. The spring or the other structure at least in part hermetically seal the interior chamber.Type: GrantFiled: September 14, 2015Date of Patent: November 20, 2018Assignee: Analog Devices, Inc.Inventors: Bradley C. Kaanta, Kemiao Jia
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Publication number: 20170369304Abstract: A capacitive microelectromechanical systems (MEMS) sensor is provided, having conductive coatings on opposing surfaces of capacitive structures. The capacitive structures may be formed of silicon, and the conductive coating is formed of tungsten in some embodiments. The structure is formed in some embodiments by first releasing the silicon structures and then selectively coating them in the conductive material. In some embodiments, the coating may result in encapsulating the capacitive structures.Type: ApplicationFiled: June 28, 2017Publication date: December 28, 2017Applicant: Analog Devices, Inc.Inventor: Bradley C. Kaanta
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Patent number: 9758367Abstract: Various embodiments produce a semiconductor device, such a MEMS device, having metallized structures formed by replacing a semiconductor structure with a metal structure. Some embodiments expose a semiconductor structure to one or more a reacting gasses, such as gasses including tungsten or molybdenum.Type: GrantFiled: December 9, 2015Date of Patent: September 12, 2017Assignee: Analog Devices, Inc.Inventor: Bradley C. Kaanta
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Publication number: 20170166439Abstract: Various embodiments produce a semiconductor device, such a MEMS device, having metallized structures formed by replacing a semiconductor structure with a metal structure. Some embodiments expose a semiconductor structure to one or more a reacting gasses, such as gasses including tungsten or molybdenum.Type: ApplicationFiled: December 9, 2015Publication date: June 15, 2017Inventor: Bradley C. Kaanta
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Publication number: 20170073218Abstract: A MEMS device has a substrate with a structure surface and an opposing exterior surface, microstructure formed on the structure surface of the substrate, and a cap coupled with the substrate to form a hermetically sealed interior chamber containing the microstructure. The substrate forms a trench extending from, and being open to, the opposing exterior surface to produce a sensor region and a second region. Specifically, the second region is radially outward of the sensor region. The MEMS device also has a spring integrally formed at least in part within the trench to mechanically connect the sensor region and the second region, and other structure integral with the substrate. The spring or the other structure at least in part hermetically seal the interior chamber.Type: ApplicationFiled: September 14, 2015Publication date: March 16, 2017Inventors: Bradley C. Kaanta, Kemiao Jia
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Publication number: 20160229689Abstract: A packaged microchip has a base, a die with a mounting surface, and an electrically inactive interposer between the base and the die. The interposer has a first side with at least one recess that extends no more than part-way through the interposer from the first side. Accordingly, the recess defines a top portion (of the first side) with a top area. The die mounting surface, which is coupled with the interposer, correspondingly has a die area. The top area of the interposer preferably is less than the die area.Type: ApplicationFiled: January 22, 2016Publication date: August 11, 2016Inventors: Bradley C. Kaanta, John A. Alberghini, Kemiao Jia
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Patent number: 9190682Abstract: A fuel cell system for providing power to a load, and having a safety mode, is disclosed. The system includes a fuel cell configured to convert fuel to electrical power and coupled so as to provide electrical power at a fuel cell power output, a system power port having a power connection and a data connection, configured to be reversibly coupled to the load, a power connection controller, coupled to the fuel cell power output and to the system power port, and configured to enable and disable the power connection, and a fuel cell system controller coupled to the fuel cell, the data connection and the power connection controller. The fuel cell system controller has a normal mode and a safety mode. A user selection determines whether the fuel cell system controller is in the normal mode or the safety mode. If the load has a smart power port, the data connection is configured to communicate over the smart power port.Type: GrantFiled: January 4, 2013Date of Patent: November 17, 2015Inventors: Bradley C. Kaanta, Jacob P. Lipcon, Alan P. Ludwiszewski
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Publication number: 20140191733Abstract: A fuel cell system for providing power to a load, and having a safety mode, is disclosed. The system includes a fuel cell configured to convert fuel to electrical power and coupled so as to provide electrical power at a fuel cell power output, a system power port having a power connection and a data connection, configured to be reversibly coupled to the load, a power connection controller, coupled to the fuel cell power output and to the system power port, and configured to enable and disable the power connection, and a fuel cell system controller coupled to the fuel cell, the data connection and the power connection controller. The fuel cell system controller has a normal mode and a safety mode. A user selection determines whether the fuel cell system controller is in the normal mode or the safety mode. If the load has a smart power port, the data connection is configured to communicate over the smart power port.Type: ApplicationFiled: January 4, 2013Publication date: July 10, 2014Applicant: LILLIPUTIAN SYSTEMS, INC.Inventors: Bradley C. Kaanta, Jacob P. Lipcon, Alan P. Ludwiszewski