Abstract: A venturi nozzle for a gas combustor includes an orificed gas nozzle, a venturi tube and one or more support members. The orificed gas nozzle has a longitudinal axis, an inlet and an outlet. The venturi tube is aligned with the longitudinal axis and has an entrance proximate to the outlet of the orificed gas nozzle and an exit. The support member(s) are attached between the orificed gas nozzle and the venturi tube to create a gap between the venturi tube and the orificed gas nozzle. In some embodiments, two or more venturi nozzles can be combined together in various configurations into a nozzle assembly or multi-nozzle gas combustor and attached, mounted or disposed within a stack, chimney or vented enclosure. The wall(s) of the stack, chimney or vented enclosure may include one or more openings, cut outs or vents to provide primary and secondary air to the venturi nozzles.

Abstract: A venturi nozzle for a gas combustor includes an orificed gas nozzle, a venturi tube and one or more support members. The orificed gas nozzle has a longitudinal axis, an inlet and an outlet. The venturi tube is aligned with the longitudinal axis and has an entrance proximate to the outlet of the orificed gas nozzle and an exit. The support member(s) are attached between the orificed gas nozzle and the venturi tube to create a gap between the venturi tube and the orificed gas nozzle. In some embodiments, two or more venturi nozzles can be combined together in various configurations into a nozzle assembly or multi-nozzle gas combustor and attached, mounted or disposed within a stack, chimney or vented enclosure. The wall(s) of the stack, chimney or vented enclosure may include one or more openings, cut outs or vents to provide primary and secondary air to the venturi nozzles.

Abstract: A venturi nozzle for a gas combustor includes an orificed gas nozzle, a venturi tube and one or more support members. The orificed gas nozzle has a longitudinal axis, an inlet and an outlet. The venturi tube is aligned with the longitudinal axis and has an entrance proximate to the outlet of the orificed gas nozzle and an exit. The support member(s) are attached between the orificed gas nozzle and the venturi tube to create a gap between the venturi tube and the orificed gas nozzle. In some embodiments, two or more venturi nozzles can be combined together in various configurations into a nozzle assembly or multi-nozzle gas combustor and attached, mounted or disposed within a stack, chimney or vented enclosure. The wall(s) of the stack, chimney or vented enclosure may include one or more openings, cut outs or vents to provide primary and secondary air to the venturi nozzles.

Abstract: A venturi nozzle for a gas combustor includes an orificed gas nozzle, a venturi tube and one or more support members. The orificed gas nozzle has a longitudinal axis, an inlet and an outlet. The venturi tube is aligned with the longitudinal axis and has an entrance proximate to the outlet of the orificed gas nozzle and an exit. The support member(s) are attached between the orificed gas nozzle and the venturi tube to create a gap between the venturi tube and the orificed gas nozzle. In some embodiments, two or more venturi nozzles can be combined together in various configurations into a nozzle assembly or multi-nozzle gas combustor and attached, mounted or disposed within a stack, chimney or vented enclosure. The wall(s) of the stack, chimney or vented enclosure may include one or more openings, cut outs or vents to provide primary and secondary air to the venturi nozzles.

Abstract: A smokeless flare burner includes a housing, an orificed gas nozzle, a conical diffuser, two or more support members, and a retention cap. The housing has a longitudinal axis, a first cylindrical portion, a first tapered portion, a second cylindrical portion, a second tapered portion. The first tapered portion, the second cylindrical portion and the second tapered portion form a venturi. The orificed gas nozzle is aligned with the longitudinal axis and disposed within the housing. The conical diffuser is aligned with the longitudinal axis and has a vertex disposed within the second tapered portion and a base substantially perpendicular to the longitudinal axis. The two or more support members are attached to the second tapered portion and the conical diffuser to create a gap. The retention cap is attached to the base of the conical diffuser and extends beyond a perimeter of the base of the conical diffuser.

Abstract: In a method of affecting cleaning or chamber process control to remove residues of fluorinated discharges from internal PECVD chamber hardware during manufacture of a semiconductor or integrated circuit, the improvement of removing the fluorinated discharges without opening the chamber and without causing chamber downtime, comprising: a) maximizing H-atom concentration in a gas mix of a plasma containing H2 through the use of high rf power and low pressure to obtain an in-situ H2 plasma; and b) subjecting a reactor chamber containing build-up residues from previous chamber treatment with a fluorinated plasma, with the in-situ H2 plasma from step a) without opening the chamber and without shutting down the chamber to remove the build-up residues of the fluorinated plasma.

Abstract: In a method of affecting cleaning or chamber process control to remove residues of fluorinated discharges from internal PECVD chamber hardware during manufacture of a semiconductor or integrated circuit, the improvement of removing the fluorinated discharges without opening the chamber and without causing chamber downtime, comprising:

Abstract: In a method of affecting cleaning or chamber process control to remove residues of fluorinated discharges from internal PECVD chamber hardware during manufacture of a semiconductor or integrated circuit, the improvement of removing the fluorinated discharges without opening the chamber and without causing chamber downtime, comprising:

Abstract: A pair of wheel assemblies (26, 28) are vertically spaced apart and are supported for rotation about parallel axis (30, 38) by a common support frame (10). Each wheel assembly (26, 28) comprises a pair of wheels at its ends (38, 40). The wheels (34, 40) have radially outwardly opening channel portions (80) in which traveling bearing pads (64, 66) are received. The bearing pads are secured to endless support cables (46), and also to the end portions (152) of carrier beams (150, 194) which extend between the two wheels (34 or 40) of each assembly (26, 28). The carrier beam (150, 194) is an upper portion of a carrier (48, 48', 176) onto which is placed a motor vehicle or some article which is to be stored. A first drive cable section (54) is connected to the support cable (46) and extends therefrom to a winch drum (50). A second drive cable section (58) extends from the support cable (46) in the opposite direction to the same winch drum (50).