Patents by Inventor Bradley S. Oaks

Bradley S. Oaks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMP pad analyzer
    Patent number: 7241201
    Abstract: An ultrasonic CMP polishing pad analyzer is disclosed. The analyzer provides a manufacturer or other user an ability to inspect a CMP polishing pad without removing the pad from the CMP machine by creating and displaying a topographical image of an in-service polishing pad. The analyzer includes an ultrasonic transducer and an analyzer body mounted to the CMP machine such that the ultrasonic transducer is positioned to receive reflected ultrasonic signals from a surface of the polishing pad.
    Type: Grant
    Filed: May 12, 2006
    Date of Patent: July 10, 2007
    Assignee: The Ultran Group, Inc.
    Inventors: Thomas J. Eischeid, Michael S. Biviano, Bradley S. Oaks, Raghu S. Srivatsa, Mahesh S. Bhardwaj