Abstract: A seal to prevent fluid through a first interface between the seal and a first body, includes first and second band members and a bridge member. The first band member defines a first band seal surface on first side of the first band member. The first band member is configured to provide a first fluid seal with the first body when compressed to the first body. The second band member defines a second band seal surface on a first side of the second band member. The second band member is configured to provide a second fluid seal with the first body when compressed to the first body. The first band member and the second band member at least partially define a cavity between the first band member and the second band member. The bridge member extends through the cavity and connects the first band member to the second band member.

Abstract: Methods, systems, and computer programs are directed to the design of a new showerhead purge collar for a semiconductor manufacturing apparatus. The showerhead purge collar includes a top section and a bottom section coupled to the top section and concentric with the top section. The top section has a hollow center to conduct process gas and an inlet for a purge gas on a side of the top section. The bottom section has a hollow center to conduct the process gas towards a showerhead. A plenum to conduct the purge gas is defined within the showerhead purge collar, and the bottom section includes holes to exhaust the purge gas above the showerhead.