Abstract: A lift and rotate assembly includes a shaft carrier, a ceramic shaft, a segmented sleeve, and a flanged sleeve. The shaft carrier defines a bore therethrough, the ceramic shaft is received within the bore of the shaft carrier, the segmented sleeve is seated in the shaft carrier and extends about the ceramic shaft, and the flanged sleeve defines a rotation axis and threadedly receives therein the shaft carrier. The segmented sleeve is compressively fixed and radially collapsed about the ceramic shaft within bore of the shaft carrier to limit tilt and wobble of a substrate support carried by the ceramic shaft during rotation about the rotation axis. Chamber arrangements and semiconductor processing systems including lift and rotate assemblies, methods of making lift and rotate assemblies, and methods of depositing material layers using lift and rotate assemblies are also described.

Abstract: A lift pin actuator includes an actuator body having a hub portion, a first arm portion and second arm portion, and a pad portion. The actuator body is arranged along a rotation axis, the hub portion extends about the rotation axis, and the arm portions extend outward from the hub portion in a direction opposite the rotation axis and parallel to one another. The pad portion is radially separated from the hub portion by the arm portions, the pad portion coupling the first arm portion to the second arm portion, and the pad portion has an engagement surface orthogonal relative to the rotation axis and coplanar with the arm portions to drive a lift pin above the engagement surface along the rotation axis. Chamber arrangements and semiconductor processing systems having lift pin actuators, as well as related methods of making lift pin actuators and actuator arrangements, are also described.

Abstract: A shaft member includes a shaft member body arranged along an axis having a drive end, an intermediate segment, and a seat end. The drive end defines a fixation feature therein, the intermediate segment extends from the drive end of the shaft member body, and the seat end is axially separated from the drive end of the shaft member body by the intermediate segment of the shaft member body. The seat end has one or more oblique facet to axially locate a spider member on the shaft member body. Shaft arrangements, semiconductor processing systems, and methods of making shaft members are also described.

Abstract: A shaft member includes a cylindrical body formed from a ceramic material and having a drive segment, a frustoconical segment, and an end key segment. The drive segment extends about a rotation axis, the frustoconical segment is offset from the drive segment along the rotation axis, and the end key segment extends axially from the frustoconical segment and is axially separated from the drive segment by the frustoconical segment of the shaft member. The end key segment has a first circumferential facet and a second circumferential facet circumferentially opposite the first circumferential facet to fix the shaft member in rotation about the rotation axis relative to a support member seated when the end key segment is slidably received within an end key socket defined within the support member. Process kits, semiconductor processing systems, and methods of making semiconductor processing systems are also described.

Abstract: A lift pin actuator includes a castellated annulus, a first arm, a second arm, and a pin pad. The annulus arranged along a rotation axis and has a first merlon and a second merlon circumferentially separated by a crenel. The first arm is connected to the first merlon and extends outward from the annulus, the second arm is connected to the second merlon and extends outward from the annulus, and the second arm is circumferentially spaced from the first arm by a radial gap. The pin pad is connected to the annulus by the first arm and the second arm, is radially spaced from the annulus by the radial gap, and radially overlaps the crenel to nest a support member within the lift pin actuator during translation of the lift pin actuator along the rotation axis relative to the support member. Process kits, semiconductor processing systems, methods of making lift pin actuators and related material layer deposition methods are also described.