Patents by Inventor Bram Paul Theodoor Van Goch

Bram Paul Theodoor Van Goch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
    Publication number: 20240134289
    Abstract: A method includes detecting data associated with a patterning device and/or a lithographic apparatus, performing an action from a plurality of actions when a determination not to proceed is made, and performing the action on the patterning device and/or a lithographic apparatus.
    Type: Application
    Filed: February 3, 2022
    Publication date: April 25, 2024
    Applicants: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Bram Paul Theodoor VAN GOCH, Johan KUNNEN, Sae Na NA
  • Lithographic apparatuses and methods for compensating for eigenmode coupling
    Patent number: 9329502
    Abstract: A lithographic apparatus can include a component and a positioning system operatively coupled and configured to move the component along a first axis. The positioning system can be configured to measure a position of the component along a second axis or a third axis. The positioning system can also be configured to control movement of the component so as to compensate for an effect of eigenmode coupling between the movement of the component along the first axis and the measured position of the component along the second axis or the third axis. In some embodiments, the component is a reticle stage or a wafer stage.
    Type: Grant
    Filed: April 11, 2013
    Date of Patent: May 3, 2016
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Christopher Charles Ward, Mark Henricus Wilhelmus Van Gerven, Bram Paul Theodoor Van Goch