Abstract: A method of fabricating a fluid component body includes forming a monolithic fluid component body including a valve segment having an annular upper perimeter wall portion defining a valve cavity and a lower base portion defining first and second flow ports, and a conduit segment extending from one of the first and second flow ports and including a conduit end portion defining a tubular portion extending in a first direction and spaced apart from a remainder of the fluid component body. The conduit end portion is bent from the first direct to a second direction.

Abstract: An actuator includes a housing defining an inlet port, a piston and a return spring disposed within the housing, and an elastically deformable element. The return spring is configured to apply a biasing force to the piston to move the piston to a spring return position. A first fluid pressure applied to the inlet port moves the piston against the biasing force of the return spring to a first actuated position in which the piston indirectly engages a stop portion of the actuator housing. A second fluid pressure, greater than the first fluid pressure, applied to the inlet port moves the piston against the elastically deformable element to compress the elastically deformable element to move the piston to a second actuated position beyond the first actuated position.

Abstract: A valve includes a valve body having first and second fluid ports extending to a valve cavity, a seat carrier subassembly installed in the valve cavity and including a seat carrier body with a first annular inner wall defining a first flow aperture aligned with the first fluid port and a valve seat disposed in an annular recess surrounding the first annular inner wall, and a second annular inner wall defining a second flow aperture aligned with the second fluid port. A valve element is disposed within the valve cavity and is movable between a closed position sealing against the valve seat and an open position permitting fluid flow across the valve seat between the first and second flow apertures. An outer periphery of an orifice restriction is seated against an interior portion of one of the first annular inner wall and the second annular inner wall.

Abstract: An actuator assembly includes a unitary actuator housing, a plurality of pilot valves, and a plurality of actuating members. The actuator housing defines a plurality of actuator cavities and a plurality of internal passages each extending from a corresponding actuation ports on the actuator housing to a corresponding one of the actuator cavities, and an internal pressurization passage extending from a single supply port on the actuator housing to a plurality of branch ports each adjacent a corresponding one of the actuation ports. The pilot valves each have an inlet port coupled to a corresponding branch port and an outlet port coupled to a corresponding actuation port. The actuating members are disposed in the corresponding actuator cavities and are movable within the actuator cavities in response to fluid pressurization of the single supply port and movement of the corresponding pilot valve to an open position.

Abstract: A valve includes a valve body having first and second fluid ports extending to a valve cavity, a seat carrier subassembly installed in the valve cavity and including a seat carrier body with a first annular inner wall defining a first flow aperture aligned with the first fluid port and a valve seat disposed in an annular recess surrounding the first annular inner wall, and a second annular inner wall defining a second flow aperture aligned with the second fluid port. A valve element is disposed within the valve cavity and is movable between a closed position sealing against the valve seat and an open position permitting fluid flow across the valve seat between the first and second flow apertures. An outer periphery of an orifice restriction is seated against an interior portion of one of the first annular inner wall and the second annular inner wall.

Abstract: A valve cavity cap arrangement including an insert and a threaded cap is provided in combination with a valve body defining a valve cavity, a central passage, and at least one offset passage. The insert is received in the valve cavity and includes an inner annular sealing surface sized to seal against a portion of the recessed surface surrounding the central passage, an outer annular sealing surface sized to seal against an outer periphery of the recessed surface, surrounding the offset passage(s), and a solid web portion extending between the inner and outer annular sealing surfaces. The threaded cap includes an outer threaded portion threadably engaged with an internal threaded portion of the valve cavity, a central end portion configured to apply a first sealing force to the inner annular sealing surface, and an outer end portion configured to apply a second sealing force to the outer annular sealing surface.

Abstract: A manifold body includes a body block, with one or more end connections each extending laterally outward from a first surface of the body block, one or more lower valve cavities each recessed laterally inward from the first surface, one or more upper valve cavities each recessed laterally inward from the first surface and connected with a corresponding one of the one or more lower valve cavities by a vertically extending second passage, one or more lower end ports each extending laterally outward from a second surface of the body block and connected with a corresponding one of the one or more lower valve cavities by a laterally extending third passage, and one or more upper end ports each extending laterally outward from the second surface and connected with a corresponding one of the one or more upper valve cavities by a laterally extending fourth passage.

Abstract: A manifold body includes a body block, with one or more end connections each extending laterally outward from a first surface of the body block, one or more lower valve cavities each recessed laterally inward from the first surface, one or more upper valve cavities each recessed laterally inward from the first surface and connected with a corresponding one of the one or more lower valve cavities by a vertically extending second passage, one or more lower end ports each extending laterally outward from a second surface of the body block and connected with a corresponding one of the one or more lower valve cavities by a laterally extending third passage, and one or more upper end ports each extending laterally outward from the second surface and connected with a corresponding one of the one or more upper valve cavities by a laterally extending fourth passage.

Abstract: An actuator includes a housing defining an inlet port, a piston and a return spring disposed within the housing, and an elastically deformable element. The return spring is configured to apply a biasing force to the piston to move the piston to a spring return position. A first fluid pressure applied to the inlet port moves the piston against the biasing force of the return spring to a first actuated position in which the piston indirectly engages a stop portion of the actuator housing. A second fluid pressure, greater than the first fluid pressure, applied to the inlet port moves the piston against the elastically deformable element to compress the elastically deformable element to move the piston to a second actuated position beyond the first actuated position.

Abstract: A fluid distribution system includes a mass flow controller and a first manifold assembly. The mass flow controller includes first and second end ports each extending from a lower end of the mass flow controller, proximate corresponding first and second sides of the mass flow controller, for lateral flow through the mass flow controller from the first end port to the second end port. The first manifold assembly includes a first end connection coupled to the first end port of the mass flow controller. The first manifold assembly includes a first manifold body extending parallel to the first side of the mass flow controller, and a plurality of first valve subassemblies retained in the first manifold body and arranged across a plane extending substantially parallel to the first side of the mass flow controller, with valve movement perpendicular to the first side of the mass flow controller.

Abstract: A manifold body includes at least first and second valve body segments each comprising an upper perimeter wall portion defining a valve cavity and a lower base portion defining one or more flow ports, a unified leak test port, a first branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the first valve body segment, radially outward of an outer seal surface in the valve cavity, and a second branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the second valve body segment, radially outward of an outer seal surface in the valve cavity.

Abstract: An actuator includes a housing defining an inlet port, a piston and a return spring disposed within the housing, and an elastically deformable element. The return spring is configured to apply a biasing force to the piston to move the piston to a spring return position. A first fluid pressure applied to the inlet port moves the piston against the biasing force of the return spring to a first actuated position in which the piston indirectly engages a stop portion of the actuator housing. A second fluid pressure, greater than the first fluid pressure, applied to the inlet port moves the piston against the elastically deformable element to compress the elastically deformable element to move the piston to a second actuated position beyond the first actuated position.

Abstract: A check valve includes a valve body (210) and a valve element (230). The valve body includes an outer circumferential wall (223) extending between an inlet port (221) and an outlet port (222), an inner circumferential wall (245) defining a guide passage extending to a radial wall, one or more outer peripheral flow passages between the inner circumferential wall and the outer circumferential wall and extending from the inlet port to the outlet port, and a valve seat (225) surrounding the inlet port. The valve element is retained in the guide passage and is movable between a closed position and an open position. The valve body includes a body housing (220) defining the outer circumferential wall and a carrier member (240) assembled with the body housing and defining the inner circumferential wall and the radial wall. The valve seat comprises an annular seal member retained between an end face of the carrier member and a counterbore portion of the body housing.

Abstract: A fluid distribution system includes a mass flow controller and a first manifold assembly. The mass flow controller includes first and second end ports each extending from a lower end of the mass flow controller, proximate corresponding first and second sides of the mass flow controller, for lateral flow through the mass flow controller from the first end port to the second end port. The first manifold assembly includes a first end connection coupled to the first end port of the mass flow controller. The first manifold assembly includes a first manifold body extending parallel to the first side of the mass flow controller, and a plurality of first valve subassemblies retained in the first manifold body and arranged across a plane extending substantially parallel to the first side of the mass flow controller, with valve movement perpendicular to the first side of the mass flow controller.

Abstract: An actuator assembly includes a unitary actuator housing defining a plurality of actuator cavities each extending along a central axis from an upper surface of the actuator housing to a lower surface of the actuator housing. A plurality of actuating members are each disposed in an upper counterbore portion of a corresponding one of the plurality of actuator cavities and movable within the corresponding actuator cavity. A plurality of output shafts each extend through a lower bore in a corresponding one of the plurality of actuator cavities, with each output shaft being driven by a corresponding one of the plurality of actuating members.

Abstract: A valve cavity cap arrangement including an insert and a threaded cap is provided in combination with a valve body defining a valve cavity, a central passage, and at least one offset passage. The insert is received in the valve cavity and includes an inner annular sealing surface sized to seal against a portion of the recessed surface surrounding the central passage, an outer annular sealing surface sized to seal against an outer periphery of the recessed surface, surrounding the offset passage(s), and a solid web portion extending between the inner and outer annular sealing surfaces. The threaded cap includes an outer threaded portion threadably engaged with an internal threaded portion of the valve cavity, a central end portion configured to apply a first sealing force to the inner annular sealing surface, and an outer end portion configured to apply a second sealing force to the outer annular sealing surface.

Abstract: A valve includes a valve body having first and second fluid ports extending to a valve cavity, a seat carrier subassembly installed in the valve cavity and including a seat carrier body with a first annular inner wall defining a first flow aperture aligned with the first fluid port and a valve seat disposed in an annular recess surrounding the first annular inner wall, and a second annular inner wall defining a second flow aperture aligned with the second fluid port. A valve element is disposed within the valve cavity and is movable between a closed position sealing against the valve seat and an open position permitting fluid flow across the valve seat between the first and second flow apertures. An outer periphery of an orifice restriction is seated against an interior portion of one of the first annular inner wall and the second annular inner wall.

Abstract: A method of fabricating a fluid component body includes forming a monolithic fluid component body including a valve segment having an annular upper perimeter wall portion defining a valve cavity and a lower base portion defining first and second flow ports, and a conduit segment extending from one of the first and second flow ports and including a conduit end portion defining a tubular portion extending in a first direction and spaced apart from a remainder of the fluid component body. The conduit end portion is bent from the first direct to a second direction.

Abstract: A method of fabricating a fluid component body includes forming a monolithic fluid component body including a valve segment having an annular upper perimeter wall portion defining a valve cavity and a lower base portion defining first and second flow ports, and a conduit segment extending from one of the first and second flow ports and including a conduit end portion defining a tubular portion extending in a first direction and spaced apart from a remainder of the fluid component body. The conduit end portion is bent from the first direct to a second direction.

Abstract: A valve includes a valve body with an annular valve seat having a first central axis, and a valve closure subassembly assembled with the valve body and including an axially movable valve stem and a stem tip attached to the valve stem by a stem connector and including an annular seal portion having a second central axis. When the first central axis is misaligned with the second central axis, the stem tip is pivotable about the valve stem to effect angular adjustment of the annular seal portion of the stem tip into uniform sealing engagement with the annular valve seat when a closing force is applied to the valve stem. The stem connector is configured to resist pivoting movement of the stem tip when the valve stem is in the open position.