Abstract: Nanoimprint lithography (NIL) method to fabricate electrodes with high specific Pt surface areas that can be used in fuel cell devices. The Pt catalyst structures were found to have electrochemical active surface areas (EAS) ranging from 0.8 to 1.5 m2g?1 Pt. These NIL catalyst structures include fuel cell membrane electrode assemblies (MEA) that are prepared by directly embossing a Nafion membrane. The features of the mold were transferred to the Nafion® and a thin film of Pt was deposited at a wide angle to form the anode catalyst layer. The resulting MEA yielded a Pt utilization of 15,375 mW mg?1 Pt compared to conventionally prepared MEAs (820 mW mg?1 Pt).