Abstract: A micro electro mechanical system (MEMS) microphone includes a base including a port extending through the base, a shim assembly, an ingress protection element, and a MEMS device. The shim assembly is disposed on the base and over the port. The shim assembly has a plurality of walls that form a hollow interior cavity. The shim assembly also has a top surface and a bottom surface coupled to the base. The ingress protection element extends over and is coupled to the top of the shim assembly to enclose the cavity of the shim assembly. The shim assembly elevates the ingress protection element above the base and is effective to prevent the passage of contaminants there through. The MEMS device includes a diaphragm and a back plate and is disposed over the ingress protection element.

Abstract: A micro electro mechanical system (MEMS) microphone includes a base including a port extending through the base, a shim assembly, an ingress protection element, and a MEMS device. The shim assembly is disposed on the base and over the port. The shim assembly has a plurality of walls that form a hollow interior cavity. The shim assembly also has a top surface and a bottom surface coupled to the base. The ingress protection element extends over and is coupled to the top of the shim assembly to enclose the cavity of the shim assembly. The shim assembly elevates the ingress protection element above the base and is effective to prevent the passage of contaminants there through. The MEMS device includes a diaphragm and a back plate and is disposed over the ingress protection element.

Abstract: A micro electro mechanical system (MEMS) microphone includes a base including a port extending through the base, a shim assembly, an ingress protection element, and a MEMS device. The shim assembly is disposed on the base and over the port. The shim assembly has a plurality of walls that form a hollow interior cavity. The shim assembly also has a top surface and a bottom surface coupled to the base. The ingress protection element extends over and is coupled to the top of the shim assembly to enclose the cavity of the shim assembly. The shim assembly elevates the ingress protection element above the base and is effective to prevent the passage of contaminants there through. The MEMS device includes a diaphragm and a back plate and is disposed over the ingress protection element.

Abstract: A micro electro mechanical system (MEMS) microphone includes a base; a MEMS device disposed on the base, the MEMS device comprising a diaphragm and a back plate; a condition sensor disposed on the base; and an integrated circuit coupled to the condition sensor and the MEMS device. The MEMS device operates to detect acoustic signals in a first frequency range and the condition sensor acts as a condition sensor in the first frequency range. The condition sensor acts as a microphone in a second frequency range and the MEMS device is unused so as to extend the operating range and acoustic overload point of the MEMS device.

Abstract: A back plate for use in a microphone includes a first layer; a second layer; and a metal layer disposed between the first layer and the second layer. A first compression of the back plate provided by cooling of the first layer and the second layer. A second compression of the back plate that is in addition to the first compression, the second compression being provided by the metal layer, the first and second compressions being effective to strengthen the back plate.

Abstract: A diaphragm for deployment in a micro electro mechanical system (MEMS) microphone includes a base portion. The base portion is generally planar and has a first side and a second side. One or more protrusions are formed with and extend from the base portion. The protrusions are configured and arranged so as to stiffen the base portion and increase a range of sound pressure levels before distortion occurs.

Abstract: A microelectromechanical system (MEMS) apparatus includes a base. A MEMS device is disposed on the base. A cover encloses the MEMS device on the base. A port extends through the base, and the MEMS device is disposed over the port. A diaphragm is embedded within the base and has at least some portions that extend across the port. In an open position, the diaphragm allows the passage of sound energy from the exterior of the apparatus to the interior of the apparatus. In a closed position, the diaphragm makes contact with an outer surface of the port to at least partially block the passage of sound energy from the exterior of the apparatus to the interior of the apparatus.

Abstract: A micro electro mechanical system (MEMS) assembly includes a flexible substrate and a lid having an underside. The lid has a port extending there through, and the lid is coupled to the port. A MEMS motor is attached to the underside of the lid and communicates with the port.

Abstract: A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to reflect a substantial portion of planar acoustic energy received from the tether back into the tether.

Abstract: A high Q resonator device is disclosed. The device includes a substrate, a resonator tethered to the substrate by a tether, and an acoustic reflector etched into the substrate and positioned proximate the tether so as to reflect a substantial portion of planar acoustic energy received from the tether back into the tether.