Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.

Abstract: This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device made of organic materials. In one aspect, the EMS device includes a stationary electrode over a substrate and a movable electrode over the stationary electrode, where the movable electrode is configured to move across a gap between the movable electrode and the stationary electrode by electrostatic actuation. One or more layers between the movable electrode and the stationary electrode may be made of polymer material. One or more layers in the EMS device may include an optical layer made of polymer material and configured to attenuate energy of light corresponding to one or more wavelength ranges. In some implementations, the optical layer may include a plurality of absorber particles in a host material that is electrically insulating.

Abstract: The disclosed technology relates to methods of patterning elongated structures. In one aspect, a method of forming pillars includes providing a substrate and providing a plurality of beads on a surface of the substrate. Regions of the surface without a directly overlying bead are exposed. The method additionally includes selectively etching the exposed regions of the substrate between the beads such that a plurality of pillars is formed under areas masked by the beads. Selectively etching completely removes at least some of the beads. The pillars that are not covered by beads are etched, thereby leaving some pillars taller than others, with the pillar height pending on the amount of time a pillar was left exposed to etchant by a removed bead.