Patents by Inventor Brandon Lee Senn

Brandon Lee Senn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Equipment front end module gas recirculation
    Patent number: 10566216
    Abstract: Disclosed are methods and apparatuses for recirculating gas in an equipment front end module (“EFEM”), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: February 18, 2020
    Assignee: Lam Research Corporation
    Inventors: Brandon Lee Senn, Peter R. Wassei, Scott Vernon Wong, Silvia Rocio Aguilar Amaya, Todd Anthony Lopes, Richard Howard Gould, James Donald Keller, Steven Edmund Pracko
  • EQUIPMENT FRONT END MODULE GAS RECIRCULATION
    Publication number: 20180358239
    Abstract: Disclosed are methods and apparatuses for recirculating gas in an equipment front end module (“EFEM”), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 13, 2018
    Inventors: Brandon Lee Senn, Peter R. Wassei, Scott Vernon Wong, Silvia Rocio Aguilar Amaya, Todd Anthony Lopes, Richard Howard Gould, James Donald Keller, Steven Edmund Pracko