Patents by Inventor Brandon Wilson Verhoff

Brandon Wilson Verhoff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controlled fluid flow for cleaning an optical element
    Patent number: 10232413
    Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: March 19, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Silvia De Dea, Chunguang Xia, Gregory James Wilson, Brandon Wilson Verhoff
  • CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
    Publication number: 20170361359
    Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
    Type: Application
    Filed: August 30, 2017
    Publication date: December 21, 2017
    Inventors: Silvia De Dea, Chunguang Xia, Gregory James Wilson, Brandon Wilson Verhoff
  • Controlled fluid flow for cleaning an optical element
    Patent number: 9776218
    Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: October 3, 2017
    Assignee: ASML Netherlands B.V.
    Inventors: Silvia De Dea, Chunguang Xia, Gregory James Wilson, Brandon Wilson Verhoff
  • CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
    Publication number: 20170036252
    Abstract: A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.
    Type: Application
    Filed: November 11, 2015
    Publication date: February 9, 2017
    Inventors: Silvia De Dea, Chunguang Xia, Gregory James Wilson, Brandon Wilson Verhoff