Patents by Inventor Brannon Kelley

Brannon Kelley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems
    Patent number: 9617637
    Abstract: Systems and methods for delivering liquid precursor in a substrate processing system include supplying liquid precursor using a first valve in fluid communication with a liquid precursor source; supplying purge gas using a second valve in fluid communication with a purge gas source; arranging a third valve having a first input port in fluid communication with an output port of the first valve and a second input port in fluid communication with an output port of the second valve; arranging an input port of a first divert injector valve in fluid communication with an output port of the third valve; and operating the first valve, the second valve, the third valve and the first divert injector valve in first, second, third and fourth modes.
    Type: Grant
    Filed: July 15, 2014
    Date of Patent: April 11, 2017
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Arul Dhas, Brannon Kelley, Jaswinder Guiliani, Akhil Singhal
  • SYSTEMS AND METHODS FOR IMPROVING DEPOSITION RATE UNIFORMITY AND REDUCING DEFECTS IN SUBSTRATE PEOCESSING SYSTEMS
    Publication number: 20160017493
    Abstract: Systems and methods for delivering liquid precursor in a substrate processing system include supplying liquid precursor using a first valve in fluid communication with a liquid precursor source; supplying purge gas using a second valve in fluid communication with a purge gas source; arranging a third valve having a first input port in fluid communication with an output port of the first valve and a second input port in fluid communication with an output port of the second valve; arranging an input port of a first divert injector valve in fluid communication with an output port of the third valve; and operating the first valve, the second valve, the third valve and the first divert injector valve in first, second, third and fourth modes.
    Type: Application
    Filed: July 15, 2014
    Publication date: January 21, 2016
    Inventors: Arul Dhas, Brannon Kelley, Jaswinder Guiliani, Akhil Singhal