Abstract: Apparatus and methods for processing substrates are disclosed. In some embodiments, a substrate processing system includes: a process chamber defining an interior volume for receiving a substrate and having a plasma forming zone, a substrate support positioned within the interior volume, a resonator coil disposed proximate the plasma forming zone, and a resonant inductor tuning circuit configured to vary an RF feed point location along the resonator coil. A method of operating a substrate processing system, according to embodiments, includes: transferring a substrate to a substrate support disposed within an interior volume of a processing chamber, the interior volume having a plasma forming zone, and operating a resonant inductor tuning circuit to couple an RF power source to a first RF feed point of a plurality of RF feed points along a resonator coil disposed proximate the plasma forming zone.

Abstract: Methods for reducing oxygen content in an oxidized annealed metal nitride film comprising exposing the film to a plasma.

Abstract: Methods for reducing oxygen content in an oxidized annealed metal nitride film comprising exposing the film to a plasma.

Abstract: Apparatus and methods for processing substrates are disclosed. In some embodiments, a substrate processing system includes: a process chamber defining an interior volume for receiving a substrate and having a plasma forming zone, a substrate support positioned within the interior volume, a resonator coil disposed proximate the plasma forming zone, and a resonant inductor tuning circuit configured to vary an RF feed point location along the resonator coil. A method of operating a substrate processing system, according to embodiments, includes: transferring a substrate to a substrate support disposed within an interior volume of a processing chamber, the interior volume having a plasma forming zone, and operating a resonant inductor tuning circuit to couple an RF power source to a first RF feed point of a plurality of RF feed points along a resonator coil disposed proximate the plasma forming zone.

Abstract: Methods and apparatuses for a management console to configure a router and one or more servers to route and bind network addresses respectively are described herein. In various embodiments, the management console may configure one or more servers of one or more local area networks, each of the one or more servers coupled to the management console, to route one or more network addresses to a router remotely disposed from the one or more servers, the routing to be through one or more networking tunnels through one or more networks correspondingly coupling the one or more servers to the router communicatively. Also, in some embodiments, the management console may configure the router to route the one or more network addresses to at least one recipient server coupled to the router for binding to the at least one recipient server, the at least one recipient server being also remotely disposed from the one or more servers.

Abstract: Methods and apparatuses for a management console to configure a router and one or more servers to route and bind network addresses respectively are described herein. In various embodiments, the management console may configure one or more servers of one or more local area networks, each of the one or more servers coupled to the management console, to route one or more network addresses to a router remotely disposed from the one or more servers, the routing to be through one or more networking tunnels through one or more networks correspondingly coupling the one or more servers to the router communicatively. Also, in some embodiments, the management console may configure the router to route the one or more network addresses to at least one recipient server coupled to the router for binding to the at least one recipient server, the at least one recipient server being also remotely disposed from the one or more servers.

Abstract: Methods and apparatuses for a management console to configure a router and one or more servers to route and bind network addresses respectively are described herein. In various embodiments, the management console may configure one or more servers of one or more local area networks, each of the one or more servers coupled to the management console, to route one or more network addresses to a router remotely disposed from the one or more servers, the routing to be through one or more networking tunnels through one or more networks correspondingly coupling the one or more servers to the router communicatively. Also, in some embodiments, the management console may configure the router to route the one or more network addresses to at least one recipient server coupled to the router for binding to the at least one recipient server, the at least one recipient server being also remotely disposed from the one or more servers.